Single-Piece Optical Module for Wafer Prober Positioning
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Solution Overview
Problem
Conventional wafer probers face challenges in achieving reproducible optical coupling due to insufficient positioning accuracy, which is sensitive to positional tolerances, and require complex and time-consuming adjustments for optimal coupling efficiency.
Innovation Solution
An optical module with a single-piece solid body design featuring a curved beam deflecting region and a beam shaping region, capable of generating a collimated beam profile and a top-hat beam profile, minimizes the influence of manufacturing-related tolerances and allows for varying optical working distances without affecting coupling properties, enabling precise and reproducible positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If glass fiber-based optical modules are used for wafer-level testing, then optical coupling can be achieved, but positioning accuracy deteriorates due to sensitivity to positional tolerances
Solution Approach 1:
The patent employs a curved beam deflecting region with a specific radius of curvature to redirect the optical beam. This curved geometry enables the system to compensate for positional tolerances through geometric optics, allowing the beam to be deflected at a controlled angle while maintaining coupling reliability despite variations in component positioning.
Solution Approach 2:
The patent changes the optical parameters by introducing a beam shaping region that modifies the beam profile from a Gaussian distribution to a top-hat profile. This parameter change in the beam intensity distribution enhances the tolerance to positional variations and improves the reliability of optical coupling across different manufacturing tolerances.
2Productivity
If high-precision actuators are used to align glass fibers, then coupling efficiency improves, but device complexity increases
Solution Approach 1:
The patent extracts the beam shaping function from separate adjustable components and integrates it into the fixed optical module structure. The beam shaping region is permanently formed as part of the optical module, eliminating the need for complex, time-consuming adjustment processes while maintaining high coupling efficiency.
Solution Approach 2:
The optical module is pre-configured with the beam deflecting and beam shaping regions during manufacturing. This preliminary action of pre-shaping the beam profile ensures that when the module is installed, the optical coupling is immediately optimized without requiring subsequent adjustment procedures, thereby simplifying the overall device complexity.
3Shape
If separate beam shaping elements are used, then beam profile control improves, but device complexity increases
Solution Approach 1:
The patent merges the beam deflecting region and beam shaping region into a single integrated optical module. The beam shaping region is formed as part of the same optical component that contains the beam deflecting region, combining multiple functions into one element. This integration reduces the number of separate components while maintaining precise control over the beam profile.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical module achieves highly reproducible and precise beam positioning, reducing the impact of positional tolerances and allowing simultaneous electrical and optical testing with improved coupling efficiency and compact design.
Implementation Method 1
The beam deflecting region can be designed to deflect the light beam by total internal reflection
Implementation Method 2
the beam shaping region can be designed to shape the light beam and additionally or alternatively the deflected light beam such that the light beam has a beam profile with a homogeneous intensity distribution
Data Source
AI summary
An optical module for modifying a light beam, wherein the optical module is made of a single-piece solid body material and has a passage surface for receiving the light beam. Furthermore, the optical module comprises a beam deflecting region lying opposite the passage surface for deflecting the light beam, wherein the beam deflecting region is designed as a curved region on the exterior of the optical module, in particular so as to have a hollow mirror function, a pass-through surface for outputting the light beam deflected by the beam deflecting region and a beam shaping region that is designed to shape the light beam and additionally or alternatively thereto the deflected light beam such that the light beam has a beam profile a with homogeneous intensity distribution over a specified range.