Optical Mount Pivotable About Single Point for Microlithography
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Solution Overview
Problem
Current optical element mounts for microlithography lenses lack the necessary precision and adjustability to correct aberrations without disassembly, leading to inefficiencies and potential introduction of unwanted motion impurities, which are costly and thermally unstable.
Innovation Solution
A monolithic optical element mount using folded sheet flexures that provides three degrees of rotational freedom about a single pivot point, allowing tilt, tip, and centration adjustments while constraining motion along the optical axis, enabling precise adjustments without disassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional optical element mounts are used, then the lens assembly can be assembled, but adjustments require complete disassembly and reassembly which is time-consuming and introduces motion impurities
Solution Approach 1:
The mount is divided into separate components: a cell body, a pivot mechanism with fold flexures, and adjustment elements. This segmentation allows the pivot mechanism to remain in place while enabling adjustment of lens elements without complete disassembly of the entire lens stack.
Solution Approach 2:
The mount incorporates a dynamic pivot mechanism using fold flexures that allow controlled rotational movement. This dynamic structure enables lens elements to be tilted and positioned independently while maintaining their mounted state, eliminating the need for complete disassembly and reassembly.
2Measurement precision
If multiple adjustments are made to correct aberrations, then optical performance improves, but complex mechanical assemblies introduce motion impurities and thermal instability
Solution Approach 1:
The pivot mechanism is extracted as a separate, dedicated component from the overall lens assembly. This isolated pivot structure with fold flexures provides stable, controlled movement for aberration correction without introducing the motion impurities that would result from complex mechanical adjustment assemblies integrated into the lens stack.
Solution Approach 2:
The traditional complex mechanical adjustment system is replaced with a fold flexure-based pivot mechanism. This substitution reduces mechanical complexity and motion impurities while providing the necessary degrees of freedom for correcting optical aberrations through controlled rotational movement.
3Manufacturing precision
If lens elements are adjusted after assembly, then specific aberrations can be corrected, but conventional mounts lack the precision for fine tuning without disassembly
Solution Approach 1:
The mount provides adjustment capabilities in rotational dimensions through the pivot mechanism, allowing precise positioning of lens elements in tilt and orientation without requiring disassembly. This adds dimensional freedom to the mounting system while maintaining simplicity through the fold flexure design.
Solution Approach 2:
The fold flexure mechanism enables continuous parameter changes in lens element position and orientation. By changing the fold angles of the flexures, the mount can precisely adjust lens element tilt and centration parameters while maintaining a simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise and efficient correction of optical aberrations in microlithography lenses by enabling fine tuning of lens element positioning without disassembly, reducing thermal issues and mechanical stress, and improving the accuracy and stability of the optical system.
Implementation Method 1
the inner member is suspended within the outer member by a plurality of fold flexures
Implementation Method 2
each fold flexure has a fold that lies along a line that intersects the central axis at one common point
Data Source
AI summary
An optical element mount has an outer member and an inner member. The inner member has a central axis and is suspended within the outer member by a plurality of fold flexures. Each fold flexure has a fold that lies along a line that intersects the central axis at one common point, where the common point serves as a pivot point for rotational movement of the inner member.