Optical Nanostructure Integration for Thin Photonic Die Coupling

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Solution Overview

Problem

Integration of multiple semiconductor devices in wafer-level packaging poses challenges, particularly in achieving efficient optical transformations and reducing component complexity and thickness.

Innovation Solution

Incorporation of optical nanostructures in semiconductor devices to perform optical transformations before radiation reaches the grating coupler, eliminating the need for multiple optical components and simplifying the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple optical components are used to achieve optical transformations, then optical functionality is improved, but device complexity and thickness increase

Engineering Contradiction:
Improveoptical transformation capabilityVSAvoidnumber of optical components
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple optical components into a single integrated optical device that performs multiple optical transformations (focusing, collimating, beam shaping) simultaneously. This merging approach maintains the optical functionality while reducing the number of discrete components and overall device thickness.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The optical device is designed with multi-functional capabilities to perform various optical transformations through different regions or modes of the same component structure, eliminating the need for separate specialized components for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple optical components are stacked to achieve optical transformations, then optical functionality is improved, but device thickness increases

Engineering Contradiction:
Improveoptical transformation capabilityVSAvoiddevice thickness
Core Design Contradiction:
Adaptability or versatilityVSLength of stationary object

Solution Approach 1:

The patent transitions from a vertical stacking arrangement of multiple optical components to a planar or laterally-integrated configuration. By redistributing optical functions across different spatial dimensions within a single device plane, the overall thickness is reduced while maintaining optical transformation capabilities.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Productivity

If traditional wafer-level packaging is used, then manufacturing efficiency is maintained, but integration of multiple semiconductor devices becomes difficult

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidintegration complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent divides the wafer into multiple device unit regions, each capable of independent processing and packaging. This segmentation allows parallel processing of multiple devices while maintaining wafer-level manufacturing efficiency, and enables flexible integration configurations without compromising production throughput.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances flexibility in optical configuration, reduces component count, and maintains manufacturing efficiency while achieving desired optical effects.

Implementation Method 1

Positions and shapes of the optical nanostructures are such to perform an optical transformation on the incident radiation of predetermined wavelength when the incident radiation passes through an area of the substrate where the optical nanostructures are located

Methodology Applied
Scientific EffectOptical transformation:

Data Source

PatentUS20250216607A1Semiconductor device and manufacturing method thereof
Publication Date: 2025.07.03 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250216607A1 patent drawing
  • US20250216607A1 patent drawing
  • US20250216607A1 patent drawing

AI summary

A semiconductor device includes a photonic die and an optical die. The photonic die includes a grating coupler and an optical device. The optical device is connected to the grating coupler to receive radiation of predetermined wavelength incident on the grating coupler. The optical die is disposed over the photonic die and includes a substrate with optical nanostructures. Positions and shapes of the optical nanostructures are such to perform an optical transformation on the incident radiation of predetermined wavelength when the incident radiation passes through an area of the substrate where the optical nanostructures are located. The optical nanostructures overlie the grating coupler so that the incident radiation of predetermined wavelength crosses the optical die where the optical nanostructures are located before reaching the grating coupler.