Optical Nozzle Displacement Sensing in Fluid Supply Heads
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Solution Overview
Problem
Existing fluid supply devices struggle to accurately detect misalignment of nozzles, which can lead to improper fluid distribution on substrates.
Innovation Solution
A fluid supply device equipped with a light sensor and light-blocking members that can switch between light-blocking and non-light-blocking positions, allowing for accurate detection of nozzle displacement based on light reception amounts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a light sensor is used to detect nozzle displacement, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent combines the light-blocking member with the nozzle assembly, making them move together as a single unit. This integration allows the detection system to monitor nozzle position indirectly through the light-blocking member's movement, reducing the need for direct complex sensing on the nozzle itself while maintaining detection accuracy
Solution Approach 2:
The light-blocking member serves as an intermediary between the nozzle and the light sensor. Instead of directly detecting nozzle position, the system detects the position of the light-blocking member which moves in conjunction with the nozzle, simplifying the detection mechanism while preserving measurement precision
2Measurement precision
If multiple light sensors are used to monitor both nozzles, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The single light sensor is designed to perform multiple functions by detecting light-blocking members from both nozzles simultaneously. This multi-functional approach allows one sensor to monitor the positions of multiple nozzles, reducing the total number of sensors needed while maintaining detection capability for all nozzles
Solution Approach 2:
The detection system is segmented into multiple light-blocking members, each associated with a specific nozzle. Each light-blocking member independently modulates light for its corresponding nozzle, allowing a single sensor to distinguish between different nozzles through spatial or temporal segmentation of the light-blocking signals
3Device complexity
If traditional detection methods are used, then device complexity is reduced, but measurement precision deteriorates
Solution Approach 1:
The patent replaces complex mechanical detection mechanisms with an optical detection system. Instead of using mechanical switches, contact sensors, or complex positioning mechanisms, the system uses light emission and detection with light-blocking members, achieving high measurement precision with a relatively simple and non-contact detection apparatus
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device can accurately detect nozzle misalignment, simplify the device configuration, and achieve miniaturization and cost reduction by using a single light sensor to monitor both nozzles.
Implementation Method 1
a light sensor that includes a light-emitting part that emits light for detection, and a light-receiving part that receives the light
Implementation Method 2
a sensing part that detects displacement of the first nozzle based on a light reception amount of the light-receiving part
Implementation Method 3
a first light-blocking member capable of being be positioned in a first non-light-blocking position that does not block the light and a first light-blocking position that blocks the light
Data Source
AI summary
Provided is a fluid supply device. The fluid supply device includes: a first nozzle that supplies a first fluid toward an object; a light sensor that includes a light-emitting part that emits light for detection, and a light-receiving part that receives the light; a first light-blocking member capable of being positioned in a first non-light-blocking position that does not block light and a first light-blocking position that blocks light; and a sensing part that detects displacement of the first nozzle based on a light reception amount of the light-receiving part. The first light-blocking member is capable of switching between the first light-blocking position and the first non-light-blocking position by displacing in conjunction with the displacement of the first nozzle.