Optical Parametric Laser Control for Suppressing Multi-Ring Profiles
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Solution Overview
Problem
The existing laser systems used in semiconductor exposure apparatuses face challenges with chromatic aberrations due to wide spectral linewidths, leading to reduced resolution, and the occurrence of multi-ring profiles in amplified light, which affects the efficiency of subsequent wavelength conversion and amplification processes.
Innovation Solution
A laser system is designed with a photon flux density control mechanism that adjusts the sum of photon flux densities of pumping and signal light to ensure an intensity distribution that monotonously decreases from the center to the periphery, using optical parametric crystals and beam power adjusting systems to prevent multi-ring profiles and enhance light collectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral linewidth, then chromatic aberrations are reduced and resolution is improved, but the device complexity increases
Solution Approach 1:
The patent extracts the line narrowing function from the laser resonator by providing a separate line narrowing module in the optical path between the laser resonator and the optical parametric amplifier. This separates the wavelength selection function from the amplification function, reducing complexity in the resonator while maintaining resolution through dedicated spectral control.
Solution Approach 2:
The patent introduces a line narrowing module as an intermediary component that mediates between the laser resonator output and the optical parametric amplifier input. This intermediary narrows the spectral linewidth before amplification, preventing chromatic aberrations without requiring the resonator itself to be overly complex.
2Shape
If the photon flux densities of pumping light and signal light are not properly controlled, then multi-ring profiles occur in the amplified light, but controlling them adds system complexity
Solution Approach 1:
The patent implements feedback control by providing a control mechanism that monitors the intensity distribution of the amplified light and adjusts the photon flux densities of the pumping light and signal light accordingly. This feedback loop suppresses multi-ring profiles by dynamically optimizing the input parameters to achieve a monotonic intensity distribution.
Solution Approach 2:
The patent changes the parameters of the input light by controlling the photon flux densities of the pumping light and signal light. By adjusting these parameters through the control mechanism, the system achieves the desired monotonic intensity distribution without requiring fundamental changes to the optical parametric amplifier structure.
3Ease of operation
If the spectral linewidth is wide, then the laser system is simpler to operate, but chromatic aberrations increase and resolution decreases
Solution Approach 1:
The patent segments the optical system into distinct functional modules: a laser resonator for generating light, a line narrowing module for spectral control, and an optical parametric amplifier for amplification. This segmentation allows each module to be optimized independently - the resonator can operate simply while the line narrowing module ensures narrow spectral linewidth for high resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system generates amplified light with a suppressed multi-ring profile, improving light collectivity and maintaining high conversion efficiency, thereby enhancing the resolution and efficiency of laser processing.
Implementation Method 1
an optical parametric crystal configured to transmit the pumping light and the signal light and output amplified light having the second wavelength
Implementation Method 2
a photon flux density control mechanism configured to control photon flux densities of the pumping light and the signal light in such a way that a sum of the photon flux densities of the pumping light and the signal light at an input end of the optical parametric crystal causes an intensity distribution of the amplified light having the second wavelength to be an intensity distribution that monotonously decreases from a center of the intensity distribution toward a periphery
Data Source
AI summary
A laser system includes a pumping laser apparatus configured to output pumping light having a first wavelength; a signal laser apparatus configured to output signal light having a second wavelength longer than the first wavelength; an optical parametric crystal configured to transmit the pumping light and the signal light and output amplified light having the second wavelength; and a photon flux density control mechanism configured to control photon flux densities of the pumping light and the signal light in such a way that a sum of the photon flux densities of the pumping light and the signal light at an input end of the optical parametric crystal causes an intensity distribution of the amplified light having the second wavelength to be an intensity distribution that monotonously decreases from a center of the intensity distribution toward a periphery thereof.