Opto-mechanical Optical Path Retardation Multiplier for MEMS
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Solution Overview
Problem
Existing MEMS devices face limitations in achieving higher optical path resolutions due to incompatible mechanical displacements with compact size, hindering advancements in Fourier Transform spectrometers and Optical Coherence Tomography applications.
Innovation Solution
An optical MEMS device incorporating a moveable corner cube reflector, a fixed mirror, and a MEMS actuator, which optically couples to extend the optical path length by displacing the corner cube reflector perpendicular to the fixed mirror, achieving a significantly longer optical path difference for a given mechanical displacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the optical path difference is increased to achieve higher resolution in Fourier transform spectrometers, then the measurement precision is improved, but the mechanical displacement required becomes incompatible with compact size MEMS devices
Solution Approach 1:
The patent transforms the linear mechanical displacement relationship into a multi-dimensional optical path configuration using a corner cube reflector. The optical beam travels through a folded path involving multiple reflections (front surface mirror, rear surface mirror, and corner cube reflector), converting a small linear mechanical displacement into a significantly extended optical path difference. This dimensional transformation allows compact MEMS devices to achieve large optical path differences without requiring large mechanical displacements.
2Measurement precision
If the optical path length is extended to achieve higher resolution, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent implements a nested optical configuration where the corner cube reflector is positioned within the optical path between the front surface mirror and rear surface mirror. The optical beam sequentially interacts with multiple reflective surfaces in a compact nested arrangement, achieving extended optical path length without proportionally increasing device volume or structural complexity. This nested configuration allows the optical components to be efficiently packed while maintaining the extended optical path required for high resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances optical path retardation, enabling higher resolution in MEMS FTIR spectrometers and increased scanning depth in OCT applications, comparable to traditional lab instruments, while maintaining compact size.
Implementation Method 1
a moveable corner cube reflector optically coupled to receive an incident beam on one edge of the corner cube reflector and operable to reflect the incident beam from another edge of the corner cube reflector
Implementation Method 2
a fixed mirror optically coupled to receive the incident beam reflected from the moveable corner cube reflector and operable to reflect the incident beam back towards the moveable corner cube reflector as a reflected beam along a reverse path of the incident beam
Data Source
AI summary
An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.