High-speed Optical Phase Measurement System for Large Field-of-View Imaging
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Solution Overview
Problem
Existing phase measurement methods, such as interferometry, face limitations including the need for multi-focal plane data collection, complex phase unwrapping processes, and susceptibility to noise, which affect the quality of 3D topography reconstruction, especially for large field-of-view measurements.
Innovation Solution
A high-speed optical phase measurement system is developed, comprising an illumination module, microscope module, interference module, camera module, high-precision positioning stage, and control and data processing module. This system achieves an infinite field-of-view fast phase measurement by using a preset angle between the reference mirror and the optical axis, and a high-precision positioning stage for continuous scanning, eliminating the need for vertical objective lens scanning and image tiling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional interferometry is used for phase measurement, then measurement precision is improved, but device complexity and measurement time increase due to multi-focal plane data collection and complex phase unwrapping processes
Solution Approach 1:
The patent extracts and eliminates the complex phase unwrapping process and multi-focal plane data collection requirements by using a simplified interferometry approach with a single focal plane, achieving phase measurement without these complicating factors
Solution Approach 2:
The patent segments the measurement process into independent pixel-wise phase calculations, allowing parallel processing and reducing overall measurement time while maintaining precision through individual pixel analysis
2Measurement precision
If conventional interferometry is used for phase measurement, then measurement precision is improved, but productivity decreases due to time-consuming multi-focal plane data collection and image tiling requirements
Solution Approach 1:
The patent implements continuous scanning of the sample stage through the interferometer, eliminating interruptions for image tiling and multi-focal plane switching, thereby maintaining continuous measurement progress and significantly improving productivity
Solution Approach 2:
The patent introduces dynamic scanning of the sample stage to replace static multi-focal plane data collection, enabling continuous movement and measurement that improves measurement speed while maintaining precision through real-time phase calculation
3Area of stationary object
If conventional interferometry is used for large field-of-view measurements, then measurement coverage is improved, but device complexity increases due to image tiling requirements
Solution Approach 1:
The patent transitions from a static multi-image tiling approach to a dynamic scanning approach that moves the sample stage through the interferometer, adding the time dimension to achieve large field-of-view coverage without increasing spatial complexity
4Productivity
If conventional interferometry is used for fast phase measurement, then productivity is improved, but measurement precision deteriorates due to noise susceptibility and incomplete data collection
Solution Approach 1:
The patent implements real-time phase calculation feedback during the scanning process, allowing continuous adjustment and optimization of measurement parameters to maintain precision while achieving fast measurement speeds through parallel processing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides high-speed, high-precision, and large-area phase measurements, achieving ultra-large field-of-view imaging in one time without image tiling, and fully utilizing the spatial bandwidth product of the microscopy system, while maintaining stability and cost-effectiveness.
Implementation Method 1
the reference mirror and the sample are both conjugate with a plane of the camera module; an emitted light from the collimated light source enters the objective lens and the reference mirror after passing through the beam splitter
Implementation Method 2
the emitted light is incident on a sample surface after passing through the objective lens, the reflected light reflected by the sample interferes with the reference light reflected by the reference mirror and is collected by the camera module
Implementation Method 3
The microscope module includes a beam splitter; an emitted light from the collimated light source enters the objective lens and the reference mirror after passing through the beam splitter
Implementation Method 4
the reflected light reflected by the sample interferes with the reference light reflected by the reference mirror and is collected by the camera module
Data Source
AI summary
Disclosed are a high-speed optical phase measurement system, a measurement method and an application thereof. The system includes an illumination module, a microscope module, an interference module, a camera module, a high-precision positioning stage and a control and data processing module. The illumination module, microscope module and interference module form an interferometer, with a preset angle between the reference mirror and the plane perpendicular to the optical axis; the high-precision positioning stage is configured to carry the sample and provide stable and accurate scanning; the emitted light from the collimated light source passes through the objective lenses and is incident on the sample and reference mirror respectively, the reflected light of the sample interferes with the reference light and is collected by the camera module; the control and data processing module implements on-line phase measurement based on the interference image.