Optical Phase Shifter PN Junctions for Implant Alignment
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Solution Overview
Problem
Optical phase shifters face issues with misalignment of slab portions during ion implantation, leading to significant changes in modulation efficiency.
Innovation Solution
The optical phase shifter is designed with a core portion and slab portions of specific conductivity types, forming a PN junction, where the slab portions are thinner than the core and arranged to interpose the core between them, allowing for misalignment compensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If slab portions are formed by ion implantation, then the PN junction can be formed between the slab portion and the core portion, but misalignment occurs during ion implantation leading to significant changes in modulation efficiency
Solution Approach 1:
The core portion is designed with convex portions that protrude toward the slab portions before the ion implantation process. This preliminary structural preparation ensures that even if misalignment occurs during ion implantation, the convex portions will still enable the slab portions to form PN junctions with the core portion, thereby maintaining modulation efficiency despite manufacturing imprecision
Solution Approach 2:
The convex portions of the core portion act as a buffer or cushion against misalignment. By having these protruding structures in place before ion implantation, the design anticipates and compensates for potential alignment errors, ensuring that the slab portions will still effectively form PN junctions even with positional deviations during manufacturing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses large changes in modulation efficiency by offsetting misalignment, improving modulation efficiency and uniform depletion layer spread.
Implementation Method 1
The core portion has a first convex portion of a first conductivity type and a second convex portion of a second conductivity type. The slab portion has a first slab portion of a first conductivity type and a second slab portion of a second conductivity type. The first convex portion and the second convex portion are arranged to form a PN junction.
Implementation Method 2
The slab portion is made of an ion implantation layer, and is located to include a portion that forms the PN junction with the core portion
Data Source
AI summary
An optical phase shifter includes a core portion and a slab portion. The core portion has a first convex portion of a first conductivity type and a second convex portion of a second conductivity type. The slab portion has a first slab portion of a first conductivity type and a second slab portion of a second conductivity type. The first slab portion is electrically connected to the first convex portion, and the second slab portion is electrically connected to the second convex portion. Within a predetermined region where a PN junction is formed between the slab portion and the core portion, the second convex portion is arranged on both sides of the core portion adjacent to the slab portion, and the first slab portion is arranged on sides of the core portion.