Optical System Polarizer Calibration at Arbitrary Angles

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Solution Overview

Problem

Current polarization calibration methods in optical systems are limited to normal or near-normal incidence angles and fail to decouple sample and system polarization effects, making them ineffective for arbitrary angles of incidence.

Innovation Solution

A calibration apparatus with a substrate and a polarizer, where the polarizer is either lithographically formed or attached to the substrate, allowing for precise determination of the polarizer orientation using a nonlinear regression algorithm and optionally aided by a crossed analyzer, enabling calibration at any arbitrary angle of incidence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the internal polarizer is stepped over a discrete set of angles for calibration, then the calibration process can be performed, but the relative orientation with respect to the polarized sample becomes a system-fitting parameter that depends on specific sample properties

Engineering Contradiction:
Improvepolarization calibration accuracyVSAvoidapplicability to arbitrary angles of incidence
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

A calibration sample with known polarization properties is introduced as an intermediary element between the system and the unknown polarized sample. This calibration sample allows the system to determine the relative orientation between the polarizer and the sample reference frame independently of the unknown sample's properties, thereby resolving the coupling between system and sample polarization effects.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The calibration process performs a preliminary determination of the polarizer's relative orientation with respect to the sample reference frame before actual measurement. By first characterizing the system response using a calibration sample with known properties, the system establishes a reference state that can be used to accurately measure unknown samples at any angle of incidence.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If the calibration is performed using a non-polarized reference sample, then the system polarization response can be acquired, but the method is limited to broadband polarized reflectometers with normal or near-normal incidence

Engineering Contradiction:
Improvecalibration method flexibilityVSAvoidpolarization calibration accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The invention changes the polarization state parameter of the calibration sample from non-polarized to polarized with known orientation. This allows the calibration to be performed at arbitrary angles of incidence by utilizing the known polarization properties of the calibration sample, thereby extending the method's applicability beyond normal incidence while maintaining calibration accuracy.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If the polarizer orientation is determined without accounting for spectrometer misalignment, then the calibration process is simpler, but the precision is reduced

Engineering Contradiction:
Improvecalibration process complexityVSAvoidpolarizer orientation determination accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The calibration process incorporates feedback by using the measured system response from the calibration sample to iteratively determine the polarizer orientation. The known polarization properties of the calibration sample provide a reference that allows the system to account for spectrometer misalignment and other systematic errors, thereby improving orientation determination accuracy without significantly increasing process complexity.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate polarization calibration of optical systems at any angle of incidence, decouples sample and system polarization, and improves precision by accounting for spectrometer misalignment, allowing for flexible orientation and accurate determination of the polarizer orientation.

Implementation Method 1

a polarizer disposed on the substrate... indicating a polarization orientation of the polarizer

Methodology Applied
Scientific EffectPolarization: Polarisation

Data Source

PatentUS8797534B2Optical system polarizer calibration
Publication Date: 2014.08.05 KLA CORP
  • US8797534B2 patent drawing
  • US8797534B2 patent drawing
  • US8797534B2 patent drawing

AI summary

An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.