Optical Measurement Polarizing Plate Beat Component Reduction
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Solution Overview
Problem
Existing optical measurement techniques face challenges in accurately measuring the transmittance or reflectance of measurement subjects with birefringence, as they often result in a beat component in the spectra, making it difficult to determine film thickness accurately and leading to reduced light reception intensity.
Innovation Solution
An optical measurement apparatus and method that includes an irradiation optical system and a reception optical system, with a polarizing plate that can be fixedly provided in either system, allowing the measurement subject to be irradiated or measured with light passing through the polarizing plate, which reduces the beat component and maintains light intensity, enabling more accurate transmittance or reflectance measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a polarizing plate is provided in both the irradiation optical system and the reception optical system, then the beat component is reduced, but the light reception intensity decreases
Solution Approach 1:
The patent extracts the polarizing plate from one of the optical systems (either irradiation or reception) while maintaining it in the other system. This selective removal eliminates the excessive light attenuation caused by having polarizing plates in both systems, while still achieving sufficient beat component reduction through the single polarizing plate to enable accurate film thickness measurement.
2Illumination intensity
If no polarizing plate is provided, then the light reception intensity is maintained, but the beat component increases making measurement difficult
Solution Approach 1:
The patent introduces a polarizing plate as an intermediary element in one of the optical systems to mediate between the need for high light reception intensity and the need to reduce beat components. The single polarizing plate acts as a sufficient mediator to achieve measurement accuracy without the excessive light loss that would occur with two polarizing plates.
3Measurement precision
If polarizing plates are provided in both systems, then the beat component is reduced, but the device complexity increases
Solution Approach 1:
The patent extracts one polarizing plate from the dual-plate configuration, simplifying the optical system structure while maintaining the essential function of beat component reduction. This reduction in the number of optical elements directly decreases device complexity and potential alignment issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for more precise measurement of transmittance or reflectance spectra by reducing the beat component and maintaining light reception intensity, thereby improving the accuracy of film thickness determination in measurement subjects with birefringence.
Implementation Method 1
a polarizing plate, wherein the polarizing plate is configured to be able to be provided in either the irradiation optical system or the reception optical system
Data Source
AI summary
An optical measurement apparatus including: an irradiation optical system configured to irradiate a measurement subject with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light travelling from the measurement subject as a result of the measurement subject being irradiated with the irradiation light; and a polarizing plate, wherein the polarizing plate is configured to be able to be provided in either the irradiation optical system or the reception optical system.