Optical Power Modulator Segmented Waveguide Transmission Lines

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Solution Overview

Problem

Mach-Zehnder interferometer (MZI) modulators in silicon photonics have a large form factor due to lengthy silicon-based phase shifters, which limits their bandwidth and performance due to weak electro-optic and free-carrier dispersion effects.

Innovation Solution

A structure for an optical power modulator is designed with segmented waveguide cores and interconnect structures, including transmission lines that are physically connected to specific sections of the waveguide cores, allowing for phase shifts and modulation of optical signals, thereby reducing the length of loaded transmission lines and enhancing electro-optic bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of stationary object

If lengthy silicon-based phase shifters are used in MZI modulators, then the form factor is large, but the bandwidth is limited due to weak electro-optic effects

Engineering Contradiction:
Improvelength of phase shifterVSAvoidbandwidth
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

The waveguide core is divided into multiple sections (first waveguide core with first and second sections, second waveguide core with first and second sections), and transmission lines are selectively connected to specific sections. This segmentation allows only portions of the waveguide to be loaded with transmission lines, reducing the total length of loaded transmission lines while maintaining modulation functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different sections of the waveguide core have different properties: some sections are loaded with transmission lines (first section of first waveguide core, second section of first waveguide core) while other sections remain unloaded. This local differentiation optimizes the electro-optic interaction in specific regions, enhancing bandwidth without requiring the entire waveguide length to be loaded.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If transmission lines are physically connected to waveguide cores, then phase modulation is achieved, but insertion loss increases

Engineering Contradiction:
Improvephase modulation capabilityVSAvoidinsertion loss
Core Design Contradiction:
Ease of operationVSLoss of energy

Solution Approach 1:

The transmission lines are segmented and selectively connected to only specific sections of the waveguide core rather than spanning the entire length. The second transmission line has a first section physically connected to the waveguide and a second section adjacent to but not connected to the first transmission line, reducing unnecessary loaded length and associated losses.

Inventive Principle:
Principle #1Segmentation

3Reliability

If the length of loaded transmission lines is reduced, then bandwidth is enhanced, but modulation efficiency may decrease

Engineering Contradiction:
Improveelectro-optic bandwidthVSAvoidmodulation efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The invention concentrates the electro-optic interaction in specific localized sections where transmission lines are physically connected to the waveguide core. These localized interaction regions are optimally positioned to achieve maximum modulation efficiency while minimizing the total loaded length, thereby enhancing bandwidth without sacrificing modulation effectiveness.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The segmented structure extends the electro-optic bandwidth of the optical power modulator while maintaining minimized insertion loss and maximized extinction ratio, addressing the limitations of traditional MZI modulators.

Implementation Method 1

An electro-optic modulator can be used as an optical switch to modulate the amplitude or phase of an optical signal under the control of an electrical signal

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Data Source

PatentUS11630335B2Optical power modulators with unloaded transmission lines
Publication Date: 2023.04.18 GLOBALFOUNDRIES US INC
  • US11630335B2 patent drawing
  • US11630335B2 patent drawing
  • US11630335B2 patent drawing

AI summary

Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A first waveguide core includes first and second sections. A second waveguide core includes a first section laterally adjacent to the first section of the first waveguide core and a second section laterally adjacent to the second section of the first waveguide core. An interconnect structure is formed over the first waveguide core and the second waveguide core. The interconnect structure includes first and second transmission lines. The first transmission line is physically connected within the interconnect structure to the first section of the first waveguide core. The second transmission line includes a first section physically connected within the interconnect structure to the second section of the first waveguide core and a second section adjacent to the first transmission line.