Optical Extraction Probe With 4F Relay for Vacuum Chamber Imaging

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing optical systems face challenges in passing a sample light beam to and from different environments while preserving image quality, particularly due to optical aberrations and vignetting issues when focusing optics are separated by large distances.

Innovation Solution

A beam extraction system comprising a first and second focusing optic, coupled by an optic relay, which provides a 4F optic path with matching optics and an extraction window to maintain image quality over extended distances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If off-axis parabolic mirrors are separated by large distances to allow space for other instruments, then more space is available for other detectors, but optical aberrations and vignetting increase causing image quality degradation

Engineering Contradiction:
Improvespace for other instrumentsVSAvoidimage quality
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

A beam relay system comprising a first beam relay optic and a second beam relay optic is introduced as an intermediary between the sample and detector. This relay system transfers the light beam through multiple optical stages, enabling the maintaining of precise optical alignment and image quality while accommodating larger separations between components and providing space for additional instruments within the vacuum chamber.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Area of stationary object

If off-axis light rays are collected over an extended sample area, then a wider field of view is achieved, but light rays miss the second mirror causing vignetting and blurring

Engineering Contradiction:
Improvefield of viewVSAvoidimage quality
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The optical path is segmented into multiple relay stages, with each beam relay optic handling a specific portion of the light beam transmission. This segmentation allows off-axis light rays from an extended sample area to be systematically redirected through each stage, ensuring that rays across the entire field of view are properly guided to the detector without vignetting or blurring.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The beam relay system utilizes multiple optical dimensions and pathways to redirect light rays. By employing a series of beam relay optics arranged in sequence, the system captures off-axis rays from an extended field of view and guides them through additional optical dimensions, ensuring comprehensive light collection and maintaining image quality across the entire sample area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Device complexity

If a single optical path is used to pass light between vacuum chambers, then the system is simpler, but image quality deteriorates over distance

Engineering Contradiction:
Improveoptical system complexityVSAvoidimage quality
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

Beam relay optics serve as intermediary elements that actively maintain and transfer the light beam across extended distances. Rather than relying on a simple direct optical path, the relay system periodically refocuses and redirects the beam, compensating for aberrations that would otherwise accumulate over distance and preserving image quality.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively passes sample light between different environments, preserving image quality and minimizing optical aberrations, suitable for use in vacuum chambers and other environments with detectors like scanning electron microscopes.

Implementation Method 1

a first focusing optic configured to form a light beam from light collected from a sample positioned at a focal point of the first focusing optic

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 2

The optic relay provides an optic path for the light beam from the first focusing optic to the second focusing optic

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 3

a second focusing optic configured to couple the light beam to a detector

Methodology Applied
Scientific EffectFocusing: Focusing

Data Source

PatentUS12607582B2Optical extraction probe for electron microscope and other vacuum chambers
Publication Date: 2026.04.21 THERMO ELECTRONICS SCI INSTR LLC
  • US12607582B2 patent drawing
  • US12607582B2 patent drawing
  • US12607582B2 patent drawing

AI summary

A beam extraction system is provided. The beam extraction system includes a first focusing optic, a second focusing optic, and an optic relay coupled to the first focusing optic and the second focusing optic. The first focusing optic is configured to form a light beam from light collected from a sample positioned at a focal point of the first focusing optic. The second focusing optic is configured to couple the light beam to a detector. The optic relay provides an optic path for the light beam from the first focusing optic to the second focusing optic.