Optical Probe Array Measurement System for Semiconductor Yield
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Solution Overview
Problem
Current measurement systems for optical semiconductor elements are inefficient, requiring a long time to measure thousands or tens of thousands of elements due to the need for individual alignment and testing with electric and optical probes, which hampers the determination of well-made or defective elements and reduces product yield.
Innovation Solution
A measurement system featuring an optical probe array with multiple optical probe groups and corresponding signal selectors, along with a control circuit to repeatedly select optical signals from all probes, allowing simultaneous measurement of multiple elements by switching between input channels, thereby reducing measurement time and increasing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If individual measurement of each optical semiconductor element is performed using separate electric and optical probes, then measurement accuracy is maintained, but measurement time becomes excessively long
Solution Approach 1:
The probe array is segmented into multiple independent measurement units, each comprising an electric probe and an optical probe that can simultaneously measure multiple optical semiconductor elements. This segmentation allows parallel measurement while maintaining individual measurement accuracy for each element.
Solution Approach 2:
Multiple electric probes and optical probes are merged into a single probe array structure that can contact and measure multiple elements simultaneously. The probes are arranged in correspondence with the element array positions, enabling combined electrical and optical measurement of multiple elements in parallel.
2Productivity
If the number of photoelectric converters and driver circuits is increased to match the number of optical semiconductor elements, then simultaneous measurement capability is improved, but device complexity and cost increase
Solution Approach 1:
A small number of photoelectric converters and driver circuits are designed to serve multiple measurement channels through time-division multiplexing. The control circuit sequentially activates different probe groups and routes their signals to the same photoelectric converters, allowing these components to perform multiple functions across different measurement channels.
Solution Approach 2:
The system dynamically switches between different probe groups and measurement channels using a control circuit that sequentially activates different combinations of electric and optical probes. This dynamic switching allows a fixed number of photoelectric converters and driver circuits to handle a variable number of measurement channels, reducing hardware requirements.
Data Source
AI summary
A measurement system includes an optical probe array including the m-number of optical probe groups arranged, each including the n-number of optical probes, the m-number of optical signal selectors each corresponding one of the optical probe groups, and a control circuit configured to control the optical signal selectors. The respective optical signal selectors select and output one of optical signals output from the n-number of the optical probes of the corresponding optical probe groups. The measurement system causes the control circuit to control the optical signal selectors to repeat the selection of the optical signals until the optical signals output from all of the optical probes included in the respective optical probe groups are selected.