Optical Probe Calibration Structure for Multi-Beam Selection
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Solution Overview
Problem
Conventional calibration structures and methodologies for optical probe systems are ineffective for certain types of calibrations, necessitating the need for improved optical calibration structures and methods to accurately quantify properties of optical test beams.
Innovation Solution
The optical calibration structure includes a reflector and an optical detector, with an obstructive structure along the beam path to permit and restrict electromagnetic radiation, allowing simultaneous calibration of multiple optical probes by directing and reflecting test beams through a specific path while blocking others, using a reflector and obstructive structure to enhance sensitivity and reduce costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional calibration structures are used for optical probe systems, then the calibration process can be performed, but the calibration effectiveness is insufficient for certain types of calibrations
Solution Approach 1:
An optical intermediary structure is introduced between the optical probe and the optical detector. This intermediary includes a movable element that can be positioned to either block or permit the optical test beam to reach the detector, enabling precise control over the calibration process and allowing for more effective calibration measurements.
2Productivity
If multiple optical probes are calibrated simultaneously using conventional methods, then calibration time is reduced, but cross-contamination between probe beams occurs
Solution Approach 1:
The calibration system is segmented into individual calibration paths for multiple probes. Each probe has its own movable element that can independently control the transmission of its test beam to the shared optical detector. This segmentation allows simultaneous calibration of multiple probes without cross-contamination, as each probe's beam can be selectively permitted or blocked independently.
3Device complexity
If a single optical detector is used for multiple probes, then device complexity is reduced, but the ability to selectively detect specific probe beams is lost
Solution Approach 1:
Movable elements are introduced into the optical paths of multiple probes, allowing dynamic control over which probe beams are permitted to reach the shared optical detector. These movable elements can be positioned to block or transmit specific beams as needed, providing adaptability and versatility in beam selection while maintaining a single detector system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise quantification of optical properties with improved sensitivity and reduced costs by allowing selective detection of beams from selected probes while blocking others, facilitating efficient calibration of multiple probes simultaneously.
Implementation Method 1
The reflector may be configured to receive an optical test beam of electromagnetic radiation from the optical probe and to reflect the optical test beam as a reflected beam and at a reflection angle with respect to the optical test beam
Implementation Method 2
The optical detector may be configured to receive the reflected beam and to produce a detector electrical output that quantifies at least one property of the reflected beam
Implementation Method 3
The obstructive structure may include an unobstructed region configured to permit electromagnetic radiation that is incident thereon to be received by the optical detector and an opaque region configured to restrict electromagnetic radiation that is incident thereon from being received by the optical detector
Data Source
AI summary
Optical calibration structures for optical probes, optical probe systems that include the optical calibration structures, and methods of calibrating a plurality of optical probes. The optical calibration structures include a reflector, an obstructive structure, and an optical detector. The optical probe systems include the optical calibration structure, a chuck, an optical assembly, and a signal generation and analysis assembly. The methods include methods of operating the optical probe systems and/or methods of utilizing the optical calibration structures.