Optical Probe Distance Sensor for Trench DUT Probing
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Solution Overview
Problem
Conventional probe systems are unable to reliably probe optical devices positioned within trenches below the substrate surface in state-of-the-art optical devices under test, as they lack the necessary precision and control to maintain a safe distance from the substrate while accessing optical components.
Innovation Solution
A probe system comprising an optical probe with a distance sensor and a positioning assembly, controlled by a controller that adjusts the relative orientation to maintain a threshold separation distance between the probe and the substrate, allowing for precise optical probing within trenches without physical contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional probe systems are used to access optical devices in trenches, then the probe can reach the optical components, but the probe cannot maintain a safe separation distance from the substrate surface
Solution Approach 1:
The system incorporates a distance sensor that continuously measures the separation between the probe and substrate surface, feeding this information back to the controller. The controller adjusts the probe positioning based on this feedback to maintain a safe threshold distance, preventing damage while enabling reliable optical probing of trench-embedded devices.
Solution Approach 2:
The patent replaces conventional mechanical contact-based probing with optical probing using an optical probe that transmits and receives light signals. This substitution eliminates the need for physical contact between the probe and the optical device, allowing the probe to maintain a safe separation distance while still performing measurements.
2Measurement precision
If the probe is positioned closer to the substrate to improve measurement precision, then optical signal quality improves, but the risk of physical contact and damage increases
Solution Approach 1:
By using optical fields instead of mechanical contact for probing, the system achieves high measurement precision through optical signal interaction while inherently preventing physical contact damage. The optical probe can detect and measure optical device characteristics without touching the substrate or device.
Solution Approach 2:
The patent introduces light as an intermediary between the probe and the optical device. The optical probe transmits light to the optical device and receives reflected or emitted light, enabling precise measurements without direct physical contact. This intermediary approach allows the probe to maintain a safe distance while achieving high measurement precision.
3Adaptability or versatility
If conventional probe systems operate from above the substrate surface, then the system structure is simple, but the probe cannot access optical devices positioned within trenches below the substrate surface
Solution Approach 1:
The patent extends the probing capability into the vertical dimension by enabling the optical probe to access devices positioned below the substrate surface within trenches. The system maintains operational control from above the substrate while the optical probe can reach and measure optical devices at different depths, including those embedded in trenches, thus adding vertical accessibility without proportionally increasing system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and non-damaging optical probing of devices within trenches by maintaining a controlled separation distance, ensuring accurate data collection and preventing damage to the probe or substrate.
Implementation Method 1
a distance sensor that defines a sensor surface... The controller is programmed to determine a sensed distance between the sensor surface and the substrate surface
Data Source
AI summary
Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.