Optical Probe Testing with Index-Matching Liquid
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Solution Overview
Problem
Existing optical probes for testing micro-optical components face challenges in achieving high precision, small pitch, high port count, and efficient optical coupling, particularly in 3D environments, with limitations in working distance, reproducibility, and throughput.
Innovation Solution
An optical probe with a compact probe head and micro-optical elements, operable in an index matching liquid, allows for precise optical testing of micro-optical components with low pitch accuracy, high port count, and efficient coupling, featuring movable probe heads and microfluidic elements for index matching control, enabling robust probing and high reproducibility across various wavelengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical probes are used for testing micro-optical components with small pitch and high port count, then testing precision and throughput are improved, but device complexity and difficulty of achieving reproducible coupling increase
Solution Approach 1:
The optical probe is divided into multiple independent probe heads, each capable of testing a specific channel. Each probe head contains its own optical coupling interface and positioning mechanism, allowing parallel testing of multiple channels while maintaining individual precision control
Solution Approach 2:
An index matching liquid is introduced as an intermediary medium between the probe heads and the micro-optical component array. This liquid eliminates refractive index mismatches at interfaces, dramatically improving coupling efficiency and reproducibility without requiring extremely tight mechanical tolerances
2Length of moving object
If probe heads are made compact to access narrow trenches, then accessibility to micro-optical components is improved, but working distance is reduced
Solution Approach 1:
The probe head design incorporates optical elements that manipulate light propagation in multiple dimensions. By using optical focusing and beam shaping techniques, the system achieves effective coupling at increased working distances while maintaining the compact physical footprint needed for trench access
3Reliability
If optical coupling is optimized for high reproducibility, then coupling efficiency is improved, but sensitivity to pitch variations and alignment tolerances increases
Solution Approach 1:
The system changes the optical parameter of the coupling medium by introducing index matching liquid. This parameter change transforms the coupling interface from air-based (highly sensitive to alignment) to liquid-based (tolerant of pitch variations), achieving high reproducibility without requiring sub-micron manufacturing precision
Solution Approach 2:
The optical coupling system uses a composite approach combining solid probe head structures with liquid index matching material. This composite system leverages the mechanical stability of solids and the optical benefits of liquids to achieve both robustness and high coupling efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical probe achieves precise optical testing with low variation and high throughput, supporting multiple channels simultaneously, and operates effectively in near ultraviolet, visible, and infrared ranges with reproducible coupling efficiency.
Implementation Method 1
U.S. Pat. No. 6,925,238 B2 discloses using an index matching material in a probing procedure in order to reduce reflection
Data Source
AI summary
An optical coupling between optical components and, more particularly, an optical probe for optical testing of at least one micro-optical component, a method for producing an optical probe, and a method for optical testing of at least one micro-optical component. The optical probe comprising: a probe head, wherein the probe head comprises a test component; at least one micro-optical element, wherein the micro-optical element is a separate element with regard to the test component and in mechanical contact with the test component, wherein the micro-optical element is configured to optically couple light between the test component and the micro-optical component, thereby being configured to determine an optical performance of the micro-optical component, and wherein the micro-optical element is configured to be operated in an index matching liquid.


