Optical Probe System with Rotational Stage for IC Testing
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Solution Overview
Problem
The miniaturization of semiconductor integrated circuits poses challenges for probe tools in discerning smaller circuit features, suppressing measurement errors from mechanical disturbances, and managing heat generated during testing, which affects the accuracy and functionality of optical measurements.
Innovation Solution
A multi-resolution microscopy system with a rotational stage for multiple optical objective systems, magnetic sensing for precise positioning, and a temperature control chamber for heat management, isolated from mechanical vibrations and coolant interference, allowing for high-resolution measurements and precise thermal control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high N.A. solid immersion lens is used for high resolution measurement, then measurement precision is improved, but heat generation increases affecting device functionality
Solution Approach 1:
The patent extracts the light source function from the probe tool and replaces it with an on-chip light source. This separates the heating function (removed) from the measurement function (retained), allowing high-resolution measurement without the heat generation problem of external focused light sources.
Solution Approach 2:
The patent introduces an optical waveguide as an intermediary component that delivers light from the on-chip source to the measurement point. This mediator enables precise optical measurement while the light source remains localized and controllable, preventing excessive heat generation at the measurement location.
2Reliability
If optical measurement is performed through back side of device, then electrical properties can be measured without interfering with device function, but mechanical disturbances cause measurement errors
Solution Approach 1:
The patent segments the measurement system into independent functional modules: the probe tool for electrical measurement and the optical system for optical measurement. This segmentation allows each system to operate independently through the back side of the device, reducing mutual interference and improving both reliability and precision.
Solution Approach 2:
The patent creates a multi-functional probe system that can perform both electrical measurements (through probes) and optical measurements (through objectives) simultaneously through the back side of the device. This universal platform maintains measurement reliability while enabling precise optical characterization without interfering with device function.
3Adaptability or versatility
If multiple optical objective systems are used for different magnifications, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent implements a dynamic objective selection mechanism where multiple optical objectives with different magnifications can be rapidly switched or selected based on measurement requirements. This dynamic configuration provides measurement versatility while maintaining a compact integrated structure that manages system complexity through automated control.
Solution Approach 2:
The patent nests multiple optical objectives of different magnifications within a single integrated objective holder or cartridge system. This nested arrangement allows multiple functions to be packaged in a compact form factor, improving adaptability while containing device complexity within a modular, manageable structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides accurate, high-resolution optical measurements with reduced mechanical disturbance and effective heat management, enhancing the ability to probe and test semiconductor ICs with improved precision and reliability.
Implementation Method 1
A magnetic sensing system can detect the positions of the optical objective systems
Implementation Method 2
a temperature control chamber that can hold a fluid to control the temperature of the target device
Data Source
AI summary
An optical probe system includes a sample plate for holding a target device comprising an integrated circuit, and a rotational stage that includes a plurality of ports configured to receive and hold a plurality of optical objective systems that can collect reflected or emitted light from the integrated circuit. At least one of the ports includes a centering plate mounted on the rotational stage and configured to conduct a translational movement on the rotational stage. The port also includes a gimbal plate mounted on the centering plate and that can be tilted relative to the centering plate. A first optical objective system that is mounted on the gimbal plate can be centered by the center plate and aligned by the gimbal plate.