Optical Probe Convex Spherical Incident Surface Alignment
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Solution Overview
Problem
The existing methods for testing optical semiconductor elements on semiconductor substrates are inefficient due to the need for precise alignment between optical semiconductor elements and probes, leading to increased testing time and reduced yield, as the propagation of optical signals with predetermined intensity is challenging, especially when dealing with multiple elements on a substrate.
Innovation Solution
An optical probe with a convex spherical incident surface and a refractive index distribution-type optical waveguide, where the core portion has a larger refractive index than the cladding portion, allowing for improved signal propagation and alignment, enabling the testing of multiple optical semiconductor elements simultaneously with reduced transmission loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If precise alignment between optical semiconductor elements and optical probes is performed, then optical signal propagation with predetermined intensity is achieved, but testing time increases significantly
Solution Approach 1:
The incident surface is changed from a flat surface to a convex spherical surface with a specific curvature radius (R = 0.5mm to 2mm). This parameter change in the surface geometry enables automatic alignment and reduces sensitivity to positional deviations, allowing multiple elements to be tested simultaneously without precise individual alignment, thereby resolving the contradiction between measurement precision and testing time
Solution Approach 2:
A convex spherical surface with constant curvature radius is formed on the incident surface of the optical waveguide. This curved surface configuration focuses incoming optical signals and provides a larger effective receiving area, enabling simultaneous testing of multiple elements while maintaining signal intensity requirements without requiring precise alignment for each element
2Reliability
If all optical semiconductor elements on a semiconductor substrate are tested, then yield determination is improved, but testing time increases due to sequential testing requirement
Solution Approach 1:
The optical probe is designed with a segmented array structure where multiple optical waveguides are arranged in an array configuration. Each waveguide can independently receive optical signals from corresponding semiconductor elements, enabling simultaneous testing of multiple elements and improving both productivity and yield determination accuracy
Solution Approach 2:
The optical probe with convex spherical incident surface serves multiple functions: it enables automatic alignment, receives optical signals from multiple elements simultaneously, and maintains signal intensity requirements. This multi-functionality allows all elements on a substrate to be tested efficiently, improving both throughput and reliability
3Loss of energy
If optical probes are used for testing optical semiconductor elements, then optical signal propagation is enabled, but transmission loss increases due to alignment difficulty
Solution Approach 1:
The convex spherical incident surface provides self-alignment capability where the curved geometry automatically focuses incoming optical signals regardless of small positional deviations. This self-service feature reduces the need for manual alignment operations and minimizes transmission loss without requiring complex alignment procedures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for the simultaneous testing of multiple optical semiconductor elements with minimal loss variation, reducing testing time and improving yield by optimizing the working distance and radiation angle, thus addressing the inefficiencies of traditional alignment methods.
Implementation Method 1
an incident surface of the optical waveguide, the incident surface receiving the optical signal, is a convex spherical surface with a constant curvature radius
Implementation Method 2
an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion
Implementation Method 3
the core portion has a larger refractive index than the cladding portion
Data Source
AI summary
An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.