Optical Process Alignment Using Interference Feedback Control
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Solution Overview
Problem
Existing processing systems face challenges in accurately controlling the relative positional relationship between objects and processing members, which affects the precision and effectiveness of processing operations.
Innovation Solution
A process system that utilizes a division optical system to split measurement light into multiple paths, an irradiation optical system to apply processing light, a position change apparatus to adjust the relative position, a detection apparatus to detect interference light, and a control apparatus to manage these components for precise processing and measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a processing system uses a processing light source to irradiate an object, then processing operations can be performed, but accurate control of the relative positional relationship between the object and processing member becomes difficult
Solution Approach 1:
The patent introduces a measurement light source and detection apparatus as intermediary components. The measurement light (e.g., laser) reflects off the object and is detected to determine the relative positional relationship between the object and processing member. This intermediary measurement system enables precise positional control without directly complicating the processing mechanism itself.
Solution Approach 2:
The patent implements a feedback control loop where the detection apparatus continuously monitors the relative position using measurement light, and the control apparatus adjusts the processing member's position based on detected deviations. This feedback mechanism maintains processing precision by dynamically correcting positional errors during operation.
2Measurement precision
If the system uses multiple optical paths for measurement, then detection precision improves, but device complexity increases
Solution Approach 1:
The measurement light from the measurement light source is divided into multiple beams (first light, second light, third light) that propagate along different optical paths. Each optical path reflects off different surfaces or aspects of the object, providing multiple independent measurement channels that enhance positional detection precision through segmented optical measurement.
Solution Approach 2:
The measurement light source and detection apparatus serve multiple functions: they measure the position of the object, determine the relative positional relationship between the object and processing member, and provide data for feedback control. This multi-functional approach improves measurement precision without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control of processing operations, such as removal and additive processes, by accurately adjusting the positional relationship between the object and processing elements, enhancing processing precision and efficiency.
Implementation Method 1
a detection apparatus that detects an interfering light generated by an interference between the first light and a third light, which propagates on a third optical path, of a light generated due to the second light with which the surface of the object is irradiated
Data Source
AI summary
A process system is a process system performing a processing process on an object by irradiating at least a part of the object with processing light from a processing light source, and includes a combining optical system combining optical path of measurement light from a measurement light source and optical path of the processing light from the processing light source; an irradiation optical system irradiating the object with the processing light and the measurement light from the combining optical system; a position change apparatus changing a relative positional relationship between the object and a light concentration position of the processing light from the irradiation optical system; an light reception apparatus receiving, through the irradiation optical system, light generated by the measurement light with which a surface of the object is irradiated; and a control apparatus controlling the position change apparatus by using output from the light reception apparatus.