Optical Process Alignment Using Interference Measurement Light
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Solution Overview
Problem
Existing processing systems face challenges in accurately controlling the relative positional relationship between the object and the processing light source, leading to inefficiencies in processing tasks such as removal, additive processing, and measurement of workpieces.
Innovation Solution
A process system that includes a division optical system, an irradiation optical system, a position change apparatus, a detection apparatus, and a control apparatus, which divides measurement light into multiple paths, irradiates the object with processing light, detects interfering light, and adjusts the positional relationship between the object and the processing light source to maintain precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a processing system uses a processing light source to irradiate an object, then processing capability is improved, but control accuracy of relative positional relationship deteriorates
Solution Approach 1:
The measurement light is divided into multiple beams (first light and second light) that travel through different optical paths. This segmentation allows independent measurement of different positional relationships, enabling accurate control of the relative position between the object and processing light source while maintaining high processing capability
Solution Approach 2:
A measurement light system is introduced as an intermediary between the processing light source and the object. This measurement light, divided into multiple paths, indirectly measures the positional relationship without interfering with the processing light, thus maintaining both processing capability and measurement accuracy
2Manufacturing precision
If measurement light is used to detect positional relationship, then alignment accuracy is improved, but processing efficiency deteriorates
Solution Approach 1:
The measurement light continuously irradiates the object during the processing operation, and the detection apparatus continuously detects the positional relationship. This continuous measurement allows real-time feedback and adjustment without interrupting the processing, maintaining both high alignment accuracy and processing efficiency
Solution Approach 2:
The measurement light is prepared and divided into multiple optical paths in advance before processing begins. This preliminary setup of the measurement system allows immediate continuous measurement during processing, avoiding time loss for alignment adjustments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system ensures accurate and efficient processing by maintaining precise alignment between the object and the processing light source, improving processing quality and accuracy.
Implementation Method 1
a detection apparatus that detects an interfering light generated by an interference between the first light and a third light
Data Source
AI summary
A process system is a process system performing a processing process on an object by irradiating at least a part of the object with processing light from a processing light source, and includes a combining optical system combining optical path of measurement light from a measurement light source and optical path of the processing light from the processing light source; an irradiation optical system irradiating the object with the processing light and the measurement light from the combining optical system; a position change apparatus changing a relative positional relationship between the object and a light concentration position of the processing light from the irradiation optical system; an light reception apparatus receiving, through the irradiation optical system, light generated by the measurement light with which a surface of the object is irradiated; and a control apparatus controlling the position change apparatus by using output from the light reception apparatus.