Optical Profile Measurement for Repetitive Concave-Convex Surfaces

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Solution Overview

Problem

Conventional profile measuring apparatuses face challenges in accurately measuring the profiles of complex surfaces like gears and turbines using contact sensors, which can be inefficient and prone to errors due to the need for physical contact.

Innovation Solution

A non-contact profile measuring apparatus that uses an irradiation section to project light onto the object's surface, an imaging section to capture images, a table to support the object, and a positioning mechanism to calculate and adjust the relative positions of the imaging section and table based on the object's convex and concave features, allowing for precise measurement without physical contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a contact sensor is used to measure the profile of complex surfaces, then measurement can be performed, but measurement efficiency is low and errors occur due to physical contact requirements

Engineering Contradiction:
Improveprofile measurement accuracyVSAvoidmeasurement efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces the contact sensor-based mechanical measurement system with a non-contact optical measurement system. The irradiation section projects light onto the object surface, and the imaging section captures the reflected light pattern, eliminating the need for physical contact while maintaining measurement capability for complex profiles.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent creates an optical copy of the object's surface profile by projecting light patterns and capturing reflected images. The imaging section records the light reflection pattern from the object surface, which serves as an optical replica that can be analyzed to determine the actual profile without touching the object.

Inventive Principle:
Principle #26Copying

2Reliability

If conventional contact measurement methods are used, then measurement can be performed, but the process is time-consuming and prone to errors

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidmeasurement time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent enables continuous measurement by capturing the entire profile in a single optical snapshot rather than point-by-point contact measurement. The imaging section captures the complete light reflection pattern from the entire measurement area simultaneously, allowing rapid acquisition of profile data without the sequential contact probing process.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The patent replaces the slow, sequential contact measurement process with a parallel optical measurement system that captures all profile information simultaneously through light reflection, dramatically reducing measurement time while improving reliability by eliminating contact-related errors.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If contact sensors are used for profile measurement, then measurement data can be obtained, but the risk of damage to the object increases

Engineering Contradiction:
Improveprofile measurement capabilityVSAvoidrisk of object damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical contact sensor system with a non-contact optical system. The irradiation section emits light and the imaging section captures reflections, completely eliminating physical contact between the measurement device and the object, thus removing the risk of contact-induced damage while maintaining measurement precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces light as an intermediary medium between the measurement system and the object. Instead of direct mechanical contact, the optical system uses light projection and reflection to transfer measurement information, acting as a non-contact intermediary that preserves object integrity while enabling precise profile measurement.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate and efficient measurement of complex profiles by calculating the relative positions of the imaging section and table based on edge line directions and concave-convex shapes, improving measurement speed and accuracy while reducing the risk of damage to the object.

Implementation Method 1

an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section optically connected to the irradiation section and configured to obtain an image of the measurement area including a position to which the measurement light is irradiated

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS11506484B2Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium
Publication Date: 2022.11.22 NIKON CORP
  • US11506484B2 patent drawing
  • US11506484B2 patent drawing
  • US11506484B2 patent drawing

AI summary

There is provided a profile measuring apparatus, including: an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.