Optical Profilometer Color Imaging Depth-of-Field

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Solution Overview

Problem

There is a need for optical instrumentation capable of generating data representing both the surface profile and color image of a sample, which existing technologies have not adequately addressed in terms of depth-of-field and color imaging.

Innovation Solution

The development of electro-optical systems that include a light source configured to output light of multiple colors, an optical objective to couple and direct light to a sample, and a controller to automatically control the color and vertical position of the objective, along with a detector to output data representing a surface profile and color images, utilizing techniques such as vertical scanning interferometry, confocal microscopy, and focus variation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional optical instrumentation is used for surface profiling, then depth-of-field is limited, but system complexity remains manageable

Engineering Contradiction:
Improvedepth-of-fieldVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines surface profiling and color imaging functions into a single optical system. The detector captures both interference fringe data for surface topography and color information simultaneously, eliminating the need for separate instrumentation and thereby improving depth-of-field while managing system complexity through functional integration.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The optical system is designed to perform multiple functions: it captures interference patterns for surface profiling, records color information through the detector, and generates both topographic maps and color images from a single measurement setup. This multi-functionality resolves the contradiction by achieving enhanced depth-of-field without proportionally increasing system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If separate instruments are used for surface profiling and color imaging, then individual function performance is optimized, but overall system complexity increases

Engineering Contradiction:
Improvesurface profile accuracyVSAvoidinstrumentation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges surface profiling and color imaging into a single integrated system. The detector simultaneously captures interference fringe patterns for topography and color information, producing both surface profile data and color images from one measurement, thereby maintaining measurement precision while reducing instrumentation complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system achieves universality by using a single optical path and detector to perform both surface profiling and color imaging. The controller processes the detector output to generate both topographic maps and color images, eliminating the need for separate instruments and reducing overall system complexity while preserving the precision of surface profile measurements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If multiple detectors are used for simultaneous surface profiling and color imaging, then measurement capability is enhanced, but device complexity and cost increase

Engineering Contradiction:
Improvedual measurement capabilityVSAvoiddetector system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs a single detector that serves dual purposes: capturing interference fringe patterns for surface profiling and recording color information. The controller processes this single detector's output to generate both topographic maps and color images, thereby achieving adaptability for dual measurement capabilities without increasing detector system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system achieves dual measurement capability by utilizing different parameters from the same detector output. The controller analyzes specific characteristics of the detected light (interference patterns versus color intensity) to extract both surface topography and color information, demonstrating how parameter changes in data processing can provide versatility without hardware complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These systems provide high-resolution, non-contact surface profiling and color imaging with improved depth-of-field and reduced system complexity, enabling accurate measurement of surface topography and color representation.

Implementation Method 1

an optical objective configured to couple the output light from the light source to a sample under measurement when present, and direct reflected light from the sample

Methodology Applied
Scientific EffectLight coupling and reflection: Reflection

Implementation Method 2

utilizing techniques such as vertical scanning interferometry, confocal microscopy, and focus variation

Methodology Applied
Scientific EffectVertical scanning interferometry: Interference

Implementation Method 3

a detector configured to receive the reflected light and to detect focus, and output data representing a surface profile of the sample

Methodology Applied
Scientific EffectFocus detection: Focusing

Implementation Method 4

a light source configured to selectively output light... The color of the light is selected from multiple colors

Methodology Applied
Scientific EffectMulti-color light emission: Light

Data Source

PatentUS10948284B1Optical profilometer with color outputs
Publication Date: 2021.03.16 KLA CORP
  • US10948284B1 patent drawing
  • US10948284B1 patent drawing
  • US10948284B1 patent drawing

AI summary

A system includes a light source configured to selectively output light. An optical objective is configured to couple the output light from the light source to a sample under measurement when present, and direct reflected light from the sample. A controller is configured to automatically control a color of the output light and a vertical position of the optical objective relative to the sample. The color of the light is selected from multiple colors. The vertical position includes a range of vertical positions scanned by the objective. A detector is configured to receive the reflected light and to detect focus, and output data representing a surface profile of the sample. The output data includes color images of the surface profile.