Optical Relaying Device for XUV Output Coupling

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Solution Overview

Problem

Conventional methods for output coupling XUV radiation from high-finesse optical cavities suffer from low efficiency, limited bandwidth, and high losses, making it challenging to extract all generated harmonics while maintaining low thermal lensing and high damage thresholds.

Innovation Solution

An optical relaying device with anti-reflection coatings on both sides of a transparent plate is used to selectively transmit or reflect radiation components based on their wavelengths, allowing for efficient output coupling of XUV radiation by adjusting the incident and emergent angles to minimize losses and maximize reflectivity across a broad spectral range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional output coupling methods are used for XUV radiation, then the coupling efficiency is low and losses are high, but the device complexity is also low

Engineering Contradiction:
Improveoutput coupling efficiencyVSAvoidradiation losses
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent changes the optical parameters of the plate by applying wavelength-specific anti-reflection coatings and adjusting the angle of incidence. This allows the plate to transmit fundamental radiation efficiently while reflecting XUV radiation, resolving the contradiction between coupling efficiency and energy losses

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite structure consisting of a transparent plate with multiple anti-reflection coatings designed for different wavelength ranges. This composite approach enables selective wavelength transmission and reflection, achieving high output coupling efficiency for XUV while maintaining low losses

Inventive Principle:
Principle #40Composite materials

2Productivity

If the bandwidth for output coupling is limited, then the reflectivity is high at specific wavelengths, but the spectral range coverage is restricted

Engineering Contradiction:
Improveoutput coupling efficiencyVSAvoidspectral bandwidth
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The patent employs multiple anti-reflection coatings with different spectral characteristics on the same plate. This composite coating structure enables the device to maintain high reflectivity across a broad spectral range from XUV to IR, simultaneously achieving high efficiency and broad bandwidth

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The optical relaying device is designed to perform multiple functions: transmitting fundamental radiation, reflecting XUV radiation, and maintaining broadband spectral coverage. This multi-functionality resolves the contradiction between efficiency and adaptability

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If the incident angle is optimized for maximum reflectivity, then the output coupling efficiency improves, but the alignment precision requirements increase

Engineering Contradiction:
Improveoutput coupling efficiencyVSAvoidangular alignment precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent optimizes the angle of incidence parameter to achieve a balance between reflectivity and alignment tolerance. By carefully selecting the incident angle and coating specifications, the system achieves high output coupling efficiency while maintaining practical alignment requirements

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves ultrabroadband output coupling with increased efficiency (up to 50% across the XUV-VUV-UV-VIS-IR-MIR-FIR range, reduced losses for the fundamental radiation, and a high damage threshold, enabling efficient extraction of XUV radiation while maintaining low dispersion and thermal stability.

Implementation Method 1

an optical relaying device with a transparent plate having anti-reflection coatings on both side surfaces thereof is used

Methodology Applied
Scientific EffectAnti-reflection coating: Anti-Reflective Coating

Implementation Method 2

the second radiation component is reflected at the optical relaying device with a predetermined reflection angle. The reflection angle is equal to at least one of said incident and emergent angles

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS9030733B2Spatially relaying radiation components
Publication Date: 2015.05.12 PRONIN OLEG
  • US9030733B2 patent drawing
  • US9030733B2 patent drawing
  • US9030733B2 patent drawing

AI summary

A method of spatially relaying a first radiation component (1) having a first wavelength and a second radiation component (2) having a second wavelength different from the first radiation component (1), using an optical relaying device (10) which comprises a transparent plate (11) having anti-reflection coatings (12, 13) on both side surfaces thereof, comprises transmitting the first radiation component (1) across the optical relaying device (10) with predetermined incident (a) and emergent angles (β), resp., wherein said anti-reflection coatings (12, 13) being effective for the first radiation component (1) at the incident and emergent angles (α, β), resp., and reflecting the second radiation component (2) at the optical relaying device (10) with a predetermined reflection angle (a) being equal to at least one of said incident and emergent angles (α, β), wherein the first and second radiation components (1, 2) are split from each other toward different directions or combined into a common beam path. Furthermore, an optical relaying device (10) and a resonator device, in particular enhancement cavity device (100) and a laser resonator, are described.