Optical Resin Volume Dispensing Control for Semiconductor Manufacturing
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Solution Overview
Problem
Conventional resin dispensing methods in semiconductor manufacturing, such as those used in LED production, face accuracy limitations due to the minimum measurable weight being greater than the minimum dispensable quantity, leading to reduced productivity and increased costs, especially when using scales or counting droplets.
Innovation Solution
A volume-based dispensing control method that uses an optical scanner to measure the dispensed resin volume accurately, calculating corrected volumes, and adjusting dispensing accordingly, enabling precise control and rapid measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a scale is used to measure dispensing quantity, then weight measurement is possible, but the minimum measurable weight is greater than the minimum dispensing quantity, reducing measurement precision
Solution Approach 1:
The patent replaces the mechanical weighing system (scale) with an optical measurement system. The optical scanner measures the volume of dispensed resin by scanning the workpiece and calculating the volume based on the scanned data, eliminating the need for mechanical weight measurement and enabling precise measurement of minimal dispensing quantities.
Solution Approach 2:
The patent introduces an optical scanner as an intermediary measurement tool between the dispensing process and the control system. The scanner captures optical data of the dispensed resin, which is then processed to determine volume, providing a bridge that enables precise measurement without direct mechanical contact or weight-based measurement.
2Measurement precision
If a high precision scale is used to accurately control dispensing quantity, then measurement precision improves, but manufacturing cost increases and measurement speed decreases
Solution Approach 1:
The patent substitutes expensive high-precision mechanical scales with an optical measurement system consisting of an optical scanner and processing unit. This optical system achieves comparable or superior measurement precision without the high cost associated with high-precision mechanical weighing equipment.
Solution Approach 2:
The patent creates an optical copy or digital representation of the dispensed resin volume through scanning. Instead of physically weighing the resin, the system captures optical data and processes it to determine volume, providing a cost-effective digital measurement approach that eliminates the need for expensive physical measurement instruments.
3Ease of operation
If droplet counting is used for jet-type pump control, then dispensing quantity can be adjusted, but the minimum weight measurable with scale is greater than one droplet weight, limiting adjustment precision
Solution Approach 1:
The patent replaces weight-based measurement with optical volume measurement. The optical scanner directly measures the volume of dispensed resin regardless of whether it was dispensed as droplets or continuously, eliminating the limitation of being unable to measure individual droplet weights and enabling precise measurement of any dispensing quantity.
4Ease of operation
If screw-type pump rotational angle control is used, then dispensing quantity can be controlled, but the quantity cannot be accurately measured with scale
Solution Approach 1:
The patent replaces mechanical weight measurement with optical volume measurement. The system measures the actual volume of resin dispensed by the screw-type pump through optical scanning, rather than relying on theoretical calculations based on rotational angle, providing accurate measurement that reflects the true dispensed quantity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly enhances dispensing accuracy and efficiency by allowing precise volume measurement and rapid feedback, reducing defects and manufacturing costs.
Implementation Method 1
the workpieces passed through the preliminary dispensing step is scanned by an optical scanner to measure a dispensed resin volume
Data Source
AI summary
A volume-based dispensing control method is capable of enabling a pump to dispense a resin with greatly increased accuracy. The method includes: a preliminary dispensing step in which a resin is dispensed on one or more workpieces with a pump; a volume measuring step in which the workpieces passed through the preliminary dispensing step is scanned by an optical scanner to measure a dispensed resin volume; a corrected-volume calculating step in which a corrected volume of the resin to be additionally dispensed is calculated by using a difference between the dispensed resin volume measured in the volume measuring step and a predetermined dispensing volume; and a corrective dispensing step in which the resin is dispensed on the workpieces in light of the corrected volume calculated in the corrected-volume calculating step.