Optical Electromechanical Resonator for Fluid Mass Sensing
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Solution Overview
Problem
Existing electromechanical resonators face limitations in sensitivity due to capacitive sensing requiring small currents, which affects signal-to-noise ratio, and optical measurements being complex and difficult to integrate into industrial systems for detecting analytes using resonant frequency variations.
Innovation Solution
An electromechanical resonator design incorporating a fluidic channel and a photonic waveguide that deforms with oscillations, allowing for optical coupling and modulation frequency measurement to detect mass variations, enhancing sensitivity and integration simplicity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If capacitive sensing is used to detect resonance frequency variations, then the device structure is simple, but the sensitivity is limited due to small currents affecting signal-to-noise ratio
Solution Approach 1:
The patent replaces the capacitive sensing system (electrical measurement) with an optical detection system. A waveguide is integrated into the oscillator structure, and optical interference patterns are used to detect resonance frequency variations. This substitution eliminates the signal-to-noise ratio limitations of capacitive sensing while maintaining structural simplicity through monolithic integration.
2Measurement precision
If optical measurement with laser beam deflection is used to detect resonance frequency, then sensitivity is improved, but the device becomes complex and difficult to integrate into industrial systems
Solution Approach 1:
The patent merges the optical detection function directly into the mechanical oscillator structure by integrating a waveguide into the oscillator body. This monolithic integration eliminates the need for separate alignment components and complex external optical setups, making the system both sensitive and manufacturable using standard semiconductor fabrication processes.
Solution Approach 2:
The oscillator structure itself serves dual purposes: it is both the mechanical resonator and the optical waveguide carrier. The waveguide is formed as part of the oscillator fabrication process, eliminating the need for separate optical component assembly and alignment, thereby simplifying manufacturing while maintaining high sensitivity.
3Measurement precision
If a Bragg grating reflector and waveguide system is used to detect resonance frequency, then measurement accuracy is improved, but the manufacturing complexity increases significantly
Solution Approach 1:
The patent extracts and eliminates the complex Bragg grating reflector system while retaining the essential waveguide functionality. By using the waveguide alone with optical interference detection, the system achieves sufficient measurement accuracy without the manufacturing complexity of forming and aligning Bragg gratings in both the waveguide and reflector.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resonator achieves accurate estimation of resonance frequency with improved sensitivity and ease of integration, enabling effective detection of mass variations in analytes within the fluidic channel.
Implementation Method 1
a waveguide, defining a photonic circuit, provided in the oscillator, and intended to guide a light wave between an input and an output of the waveguide
Implementation Method 2
the latter being modulated according to a modulation frequency depending on the resonance frequency
Implementation Method 3
the oscillator being capable of oscillating according to a resonant frequency
Implementation Method 4
the waveguide being able to be deformed according to the frequency resonance, under the effect of the oscillation of the oscillator
Implementation Method 5
the output of the waveguide being capable of being optically coupled to a photodetector, so that the photodetector is capable of forming a representative signal the light wave propagated by the waveguide towards the photodetector
Data Source
Figure 1A~1B
Figure 2A~2D
Figure 2E~2F
AI summary
The invention is an electromechanical resonator, comprising a fixed part (10), an oscillator (20, 60), the oscillator being capable of oscillating at a resonance frequency (f), the oscillator comprising: ▪ a fluidic channel (25), defining a fluidic circuit, provided in the oscillator (20, 60), and intended to accommodate a fluid (4), the fluidic channel being capable of being deformed at the resonance frequency, under the effect of the oscillation of the oscillator; the resonator being characterized in that it also comprises: ▪ a waveguide (26), defining a photonic circuit, provided in the oscillator (20, 60), and intended to guide a light wave (7) between an input (26in) and an output (26out) of the waveguide, the waveguide (26) being capable of being deformed at the resonance frequency (f), under the effect of the oscillation of the oscillator;▪ the input of the waveguide (26in) being suitable for connection to a light source (6), the output of the waveguide being suitable for connection to a photodetector (8), so that the photodetector is suitable for forming a signal (S) representative of the light wave propagated by the waveguide towards the photodetector, the latter being modulated according to a modulation frequency (w) dependent on the resonance frequency (f); such that when under the effect of a variation (δm) of a mass (m) of the fluid (4), inducing a variation (δf) of the resonance frequency, the variation of mass (δm) can be detected by the signal formed by the photodetector.;