Optical Resonator Thermal Sensor Plasmonic Absorber

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Solution Overview

Problem

Bolometers used in thermal image cameras face reduced energy incidence and signal-to-noise ratio when pixel size is miniaturized, leading to decreased temperature change detection accuracy and degradation due to white noise.

Innovation Solution

A supersensitive thermal radiation sensor design incorporating a post, thermal absorption layer, optical resonator, plasmonic absorber, and waveguide coupler, where the plasmonic absorber is formed of metals like titanium, gold, or silver, and the thermal absorption layer is made of silica or silicon nitride, enhancing thermal absorption and reducing noise influence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the pixel size is miniaturized to achieve high resolution, then the spatial resolution is improved, but the amount of incident energy is reduced and the signal-to-noise ratio decreases

Engineering Contradiction:
Improvespatial resolutionVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent introduces an optical resonator that confines and concentrates incident infrared energy in a specific spatial configuration around the thermal absorption layer. This dimensional confinement of optical energy compensates for the reduced collection area of miniaturized pixels, maintaining sufficient energy incidence while achieving high spatial resolution through the resonant field distribution rather than physical pixel size alone.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a plasmonic absorber with specific material composition ( titanium, gold, silver, platinum, copper, aluminum, nickel, or chromium) and geometric parameters (nanorod or nanoparticle with cylindrical or hemispherical shape) to enhance thermal absorption efficiency. By optimizing these parameters, the system achieves high energy absorption in a miniaturized structure, improving the signal-to-noise ratio without sacrificing spatial resolution.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If microbolometers are used to detect temperature change, then thermal detection capability is achieved, but white noise occurs and accuracy is degraded

Engineering Contradiction:
Improvethermal detection capabilityVSAvoiddetection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent replaces the conventional electrical resistance-based detection mechanism of microbolometers with an optical resonance-based detection system. The optical resonator detects temperature changes through shifts in resonant frequency or wavelength, which are measured optically rather than electrically. This substitution eliminates the white noise inherent in electrical resistance measurements while maintaining thermal detection capability, thereby improving detection accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design increases sensitivity and accuracy of thermal radiation detection, minimizing the impact of white noise by leveraging optical characteristics and localized surface plasmon resonance for improved thermal absorption.

Implementation Method 1

an optical resonator around the thermal absorption layer

Methodology Applied
Scientific EffectOptical resonance: Resonance

Implementation Method 2

a plasmonic absorber provided on the thermal absorption layer

Methodology Applied
Scientific EffectLocalized surface plasmon resonance: Resonance

Data Source

PatentUS9429475B2Thermal radiation sensor and thermal image capturing device including same
Publication Date: 2016.08.30 SAMSUNG ELECTRONICS CO LTD
  • US9429475B2 patent drawing
  • US9429475B2 patent drawing
  • US9429475B2 patent drawing

AI summary

A thermal radiation sensor may include a thermal absorption layer, an optical resonator surrounding the thermal absorption layer, and a plasmonic absorber provided on the thermal absorption layer, and thus, the thermal radiation sensor may have high sensitivity and may be miniaturized.