Optical Reticle Load Port With Locking Mechanism
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Solution Overview
Problem
In photolithography, the removal of mask pods from load ports often results in non-perpendicular movements, leading to potential damage to the reticle, mask pod, and load port, as well as contamination due to scratching and loose particles, especially during abnormal conditions or emergencies.
Innovation Solution
The design incorporates load port supporters with embedded sensors and locking devices that detect abnormal conditions, such as separation of the mask pod components, and activate locking mechanisms to limit movement, preventing damage and contamination by ensuring a straight upward removal path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual removal of mask pod is performed, then ease of operation is improved, but reliability deteriorates due to non-perpendicular movements causing damage
Solution Approach 1:
The patent replaces manual mechanical removal with an automated mechanical system featuring a robotic arm that precisely grasps and extracts the mask pod. This automation eliminates human error in removal orientation while maintaining operational efficiency, directly resolving the contradiction between ease of operation and reliability.
Solution Approach 2:
The load port incorporates sensors and locking devices that automatically detect mask pod position and activation status, enabling the system to self-regulate the removal process. The locking device automatically engages when the mask pod is properly positioned, ensuring perpendicular removal without requiring manual intervention, thus improving both ease of operation and reliability.
2Reliability
If locking devices are added to prevent abnormal movements, then reliability is improved, but device complexity increases
Solution Approach 1:
The locking function is extracted as a separate, modular device that can be independently activated only when needed. The locking device is designed to engage specific features on the mask pod without requiring complex integration into the entire load port structure, thus improving reliability while minimizing added complexity.
Solution Approach 2:
The locking devices are pre-positioned and pre-configured in the load port structure, ready to engage immediately when abnormal movement is detected. Sensors detect potential issues before damage occurs, triggering the locking mechanism in advance to prevent catastrophic failures, thereby improving reliability without requiring complex real-time response systems.
3Measurement precision
If sensors are embedded in load port supporters, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The embedded sensors serve multiple functions: detecting mask pod position, verifying proper loading, and triggering locking mechanisms. This multi-functionality maximizes the value of the sensor integration, improving measurement precision while justifying the added complexity through enhanced system capability and reduced need for additional components.
Solution Approach 2:
The sensors act as intermediaries between the physical mask pod position and the control system. They convert physical position information into electrical signals that can be processed by the load port controller, enabling precise measurement while maintaining a clean separation between mechanical and electronic system complexities.
Data Source
AI summary
An apparatus configured to load or unload a mask pod includes a first load port supporter and a second load port supporter spaced apart from the first load port supporter. Each of the first load port supporter and the second load port supporter includes at least portions of an L-shaped rectangular prism. The first load port supporter and the second load port supporter are disposed diagonally around a rectangular area, where first inner sidewalls of the first load port supporter and second inner sidewalls of the second load port supporter delimit boundaries of the rectangular area, and where a first width of the rectangular area is equal to a second width of the mask pod, and a first length of the rectangular area is equal to a second length of the mask pod.