Optical Semiconductor Ridge Structure Without Embedded Layers

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Solution Overview

Problem

In optical semiconductor integrated elements with embedded layers, crystal defects in the light absorption layer of the photodetector section lead to deteriorated photo detecting character and reliability.

Innovation Solution

The optical semiconductor integrated element is designed without a semiconductor embedded layer on the side surfaces of the light confining layer, cladding layer, and contact layer, which eliminates crystal defects in the InGaAs or InGaAsP contact layer used as a light absorption layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a semiconductor embedded layer is provided on the side surface of the light confining layer, cladding layer, and contact layer, then light confinement is improved, but crystal defects (stacking defects/anti-phase domain) occur in the contact layer used as light absorption layer

Engineering Contradiction:
Improvelight confinementVSAvoidphoto detecting character
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent removes the semiconductor embedded layer from the side surface of the light confining layer, cladding layer, and contact layer. This extraction eliminates the source of crystal defects (stacking defects/anti-phase domains) that occur when the contact layer is grown on the embedded layer, thereby improving photo detecting character while maintaining light confinement through the ridge structure design

Inventive Principle:
Principle #2Taking out (Extraction)

2Adaptability or versatility

If the contact layer is grown on the embedded layer surface, then integration of laser and photodetector is achieved, but stacking defects occur due to non-flat surface morphology of embedded layer

Engineering Contradiction:
Improveintegration of laser and photodetectorVSAvoidcrystal quality of contact layer
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent extracts/removes the semiconductor embedded layer from the region where the contact layer is formed. This eliminates the non-flat surface morphology issue of the embedded layer that causes stacking defects, allowing the contact layer to be grown on a flat surface (directly on the cladding layer) while maintaining the integrated laser-photodetector structure through alternative design arrangements

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different structural configurations to different regions: the laser section maintains the embedded layer structure for optimal light confinement, while the photodetector section eliminates the embedded layer on side surfaces to prevent crystal defects in the contact layer. This local differentiation allows each section to have optimal crystal quality for its specific function

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration suppresses the deterioration of photo detecting character and enhances the reliability of the photodetector by eliminating crystal defects and ensuring high light confinement and absorption.

Implementation Method 1

a light confining layer which confines light

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

a contact layer formed of an InGaAs layer or an InGaAsP layer... the contact layer of the photodetector section is a light absorption layer

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS12334712B2Optical semiconductor integrated element and method of manufacturing optical semiconductor integrated element
Publication Date: 2025.06.17 MITSUBISHI ELECTRIC CORP
  • US12334712B2 patent drawing
  • US12334712B2 patent drawing
  • US12334712B2 patent drawing

AI summary

An optical semiconductor integrated element comprises a laser section and a photodetector section which are arranged on the same semiconductor substrate, the laser section and the photodetector section each have a light confining layer which confines light, a cladding layer, and a contact layer formed of an InGaAs layer or an InGaAsP layer, the light confining layer of the laser section is an active layer, the contact layer of the photodetector section is a light absorption layer, each cladding layer is a ridge structure having a shape in which a width at a side of the light confining layer is narrower than a width at a side of the contact layer in a cross-section which is perpendicular to the optical axis, and on a side surface of the light confining layer, the cladding layer and the contact layer, a semiconductor embedded layer is not provided.