Optical Scanner Wiring Protection Against Mask Contact
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Solution Overview
Problem
Existing optical scanner technologies face issues with contact between wiring lines and masks during deposition, leading to potential breaks or increased electrical resistance, which affects the reliability of the scanner.
Innovation Solution
A member for an optical scanner is designed with a structure thicker than the wiring line on its surface, preventing contact between the mask and the wiring line during deposition, and allowing for higher precision and stability in forming the light reflective portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask is disposed on the first surface to define the deposition area, then the light reflective portion can be formed with higher precision, but the mask may come in contact with the wiring line and cause breaks or increased electrical resistance
Solution Approach 1:
A support structure is introduced as an intermediary element between the mask and the wiring line. The mask is supported by this structure at a position closer to the light reflective portion than the wiring line, preventing direct contact between the mask and wiring line while maintaining precise deposition area definition.
Solution Approach 2:
The problem is resolved by transitioning from a two-dimensional planar arrangement to a three-dimensional spatial arrangement. The support structure creates vertical separation, positioning the mask in a different spatial dimension relative to the wiring line, thereby preventing contact while maintaining horizontal precision.
2Manufacturing precision
If the mask is positioned closer to the wiring line for precise deposition, then the light reflective portion can be formed with higher precision, but the wiring line may be damaged by mask contact
Solution Approach 1:
The support structure serves as a mediator that enables the mask to be positioned close to the light reflective portion for precise deposition while preventing harmful contact with the wiring line. The support structure absorbs the potential harmful interaction.
Solution Approach 2:
The support structure provides beforehand cushioning by being positioned between the mask and wiring line prior to the deposition process. This pre-positioned protective element prevents harmful contact before it can occur during mask placement or deposition.
3Reliability
If the wiring line is made thicker to prevent breakage, then the wiring line reliability improves, but the space available for other components decreases
Solution Approach 1:
The support structure acts as an intermediary protective element that allows the wiring line to remain thin while still preventing breakage. The support structure bears the mechanical load and protection function, enabling the wiring line to be optimized for electrical performance rather than mechanical strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the reliability of the optical scanner by preventing adverse effects on the wiring lines, such as breaks or increased resistance, resulting in a more stable and efficient scanning mechanism.
Implementation Method 1
a structure thicker than the wiring line is provided... the contact between the mask that defines the deposition area and the wiring line can be inhibited
Implementation Method 2
The metal film is deposited by a vapor phase deposition method such as sputtering or evaporation
Implementation Method 3
The metal film is deposited by a vapor phase deposition method such as sputtering or evaporation
Data Source
AI summary
A member for an optical scanner includes: a functional portion including a movable portion, a shaft portion oscillatably supporting the movable portion, and a support portion supporting the shaft portion; a wiring line provided on the movable portion; and a structure provided on the functional portion and thicker than the wiring line; the wiring line and the structure are provided on a first major surface of the functional portion.


