Optical-Scanning Height Measuring Device with Balancing Section
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Solution Overview
Problem
Existing optical-scanning-height measuring devices face challenges in quickly and accurately measuring surface heights while maintaining a compact configuration, as increasing the speed of measurement leads to vibration issues that require larger and heavier devices to stabilize.
Innovation Solution
The device incorporates a movable section that changes the optical path length of the reference light by moving along a linear guide rail, with a balancing section to stabilize the center of gravity, allowing for high-speed movement without increasing size or weight, and includes reflecting members to adjust the optical path length and improve measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the moving speed of the linear motion stage is increased to quickly measure the surface shape, then the measurement speed is improved, but the vibration of the dimension measuring device increases
Solution Approach 1:
A balancing section is introduced that moves in the opposite direction to the movable section, creating a counterweight effect. The balancing section includes a balancing mass that offsets the vibration generated by the movable section during high-speed movement, thereby reducing the overall vibration of the measuring device while maintaining fast measurement speed
2Object-affected harmful factors
If the size and weight of the shape measuring device are increased to prevent vibration, then the vibration is reduced, but the device becomes larger and heavier
Solution Approach 1:
Instead of increasing the overall device weight to suppress vibration, the patent uses a balancing section with a balancing mass that counteracts the vibration forces. This allows vibration reduction without proportionally increasing the device weight, as the balancing mass works dynamically to offset vibrations rather than providing passive mass stabilization
3Measurement precision
If the optical path length of the reference light is changed to improve measurement accuracy, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent introduces a movable section that moves along a linear guide rail, changing the optical path length of the reference light in a controlled manner. This dimensional movement allows dynamic adjustment of the optical path length to match different measurement requirements, improving measurement accuracy without requiring multiple fixed optical paths or complex reconfigurable systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables quick and accurate surface height measurement while maintaining a compact device size, reducing vibration and stabilizing the center of gravity, allowing for efficient and precise measurements.
Implementation Method 1
an interference-light generating section configured to generate interference light of the measurement light irradiated on the measurement object by the deflecting section to return to the dividing section from the measurement object and the reference light reflected by the reference body to return to the dividing section
Implementation Method 2
a light emitting section configured to emit temporally low-coherent light
Data Source
AI summary
To provide an optical-scanning-height measuring device capable of quickly and highly accurately measuring the height of the surface of a measurement object while being compactly configured. In order to obtain interference light appropriate for calculation of height, an optical path length of the reference light is adjusted in the reference section 250. Movable sections 252a and 252b supported by a supporting section 251 move on linearly extending two linear guides 251g, whereby the optical path length of the reference light changes. When the optical path length of the reference light is adjusted, the movable sections 252a and 252b are moved in opposite directions each other.


