Optical Scanning Layout With Adjustable Mirrors for VCSEL-MEMS Alignment
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Solution Overview
Problem
Conventional optical scanning devices face challenges in accurately directing laser light from a surface-emitting laser element to a MEMS optical deflector due to their perpendicular orientations, necessitating separate substrates or optical fibers, which hinder miniaturization and alignment precision.
Innovation Solution
An optical scanning device with a surface-emitting laser element and MEMS optical deflector on a single substrate, utilizing a plate-shaped support member with adjustable mirrors to redirect light from the laser element to the deflector, incorporating a rotating mechanism for precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the laser light source and MEMS optical deflector are mounted on separate substrates or connected by optical fiber, then the alignment and light direction can be maintained, but the device size increases and miniaturization is hindered
Solution Approach 1:
The patent merges the laser light source and MEMS optical deflector onto a single substrate, eliminating the need for separate substrates or optical fiber connections. This integration directly reduces device volume while the added mirrors compensate for alignment challenges, thus resolving the contradiction between miniaturization and alignment precision.
Solution Approach 2:
The patent introduces mirrors as intermediary components between the laser light source and MEMS optical deflector. These mirrors mediate the light path, enabling accurate alignment even when both components are integrated on the same substrate, thus maintaining manufacturing precision while achieving miniaturization.
2Ease of manufacture
If the laser light source and MEMS optical deflector both face upward perpendicular to the substrate, then the mounting is simplified, but the light cannot be directed to incident on the rotating mirror
Solution Approach 1:
The patent changes the optical path from a direct vertical arrangement to a multi-dimensional path using mirrors. The light travels upward from the laser, is reflected by the first mirror, then by the second mirror, to reach the MEMS optical deflector. This dimensional change in light propagation enables both simplified mounting and proper light direction control.
3Volume of moving object
If the diameter of the rotating mirror is made small for miniaturization, then the device becomes more compact, but accurate adjustment of the mirror direction becomes more difficult
Solution Approach 1:
The patent performs preliminary alignment actions by positioning the mirrors before final device assembly. The mirrors are arranged to pre-establish the correct optical path, compensating for the limited adjustability of the small rotating mirror. This preliminary action ensures accurate light direction control despite the compact size.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and compact optical scanning by adjusting the light emission direction using adjustable mirrors, facilitating miniaturization and improved alignment without the need for separate substrates or optical fibers.
Implementation Method 1
a first mirror extending in a second axial direction which is perpendicular to a first axial direction as an arrangement direction of the surface-emitting laser element and the MEMS optical deflector on the substrate and being parallel to the substrate, and being supported by a first support part of the plate-shaped support member so as to reflect emitted light from the surface-emitting laser element in the first axial direction
Implementation Method 2
a second mirror extending in the second axial direction, and being supported by, a second support part of the plate-shaped support member such that light from the first mirror is reflected toward the rotating mirror of the MEMS optical deflector
Data Source
AI summary
An optical scanning device includes a standing plate part which has an inclined groove and a through hole at positions above a vertical cavity surface emitting laser (VCSEL) and a micro electro mechanical systems (MEMS) optical deflector, and which is fixed to a substrate. A plate-shaped mirror and a rotary mirror have one end portions thereof in the Y-axis direction supported by the inclined groove and the through hole, respectively. The through hole has the shape of a rotating body having an axis in the Y-axis direction as the centerline thereof.