Optical Scattering Measurement of Low-Dimensional Material Size
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Solution Overview
Problem
Existing methods for determining the key dimensions of low-dimensional materials, such as graphene, carbon nanotubes, and quantum dots, suffer from low accuracy, high cost, damage to samples, and long measurement times, and are limited in their ability to measure single particles accurately.
Innovation Solution
A method and system using optical scattering to determine key dimensions by controlling a light source to be obliquely incident on a low-dimensional material and a substrate, converting scattered light into an optical image, calculating contrast based on brightness differences, and establishing a correspondence relationship between contrast and key dimensions, allowing for accurate and cost-effective measurement of low-dimensional materials on a substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical reflection contrast method is used to detect key dimension, then the measurement can be performed, but the measurement accuracy is low and contrast is low when sample and substrate have similar refractive indexes
Solution Approach 1:
The patent introduces an optical scattering intermediary mechanism where incident light scatters off the low-dimensional material rather than reflecting directly. This scattering process creates a measurable signal that is independent of the substrate-refractive-index match problem, thereby improving both measurement accuracy and contrast simultaneously
Solution Approach 2:
The patent changes the measurement parameter from optical reflection contrast to optical scattering intensity. By measuring the intensity of scattered light instead of reflection contrast, the method overcomes the limitation of low contrast when sample and substrate have similar refractive indexes, while also improving measurement accuracy
2Measurement precision
If Raman spectroscopy method is used, then key dimension can be detected, but the equipment construction cost is high and time consumption is high
Solution Approach 1:
The patent replaces expensive, complex Raman spectroscopy equipment with a simple optical scattering measurement system using basic light sources and detectors. This simplified approach achieves comparable detection capability at much lower equipment construction cost
Solution Approach 2:
The patent substitutes the complex mechanical and optical system of Raman spectroscopy (requiring lasers, monochromators, and sophisticated detection paths) with a simpler optical scattering system that uses basic illumination and intensity measurement, reducing both device complexity and cost
3Measurement precision
If scanning electron microscope method is used, then key dimension can be measured, but the sample morphology changes due to electron bombardment and sample is damaged
Solution Approach 1:
The patent replaces the electron beam-based scanning electron microscope with an optical scattering measurement system using photons instead of electrons. This substitution eliminates the harmful electron bombardment that causes sample morphology changes and damage, while maintaining measurement capability through optical means
4Quantity of substance
If dynamic laser scattering method is used, then particle size distribution can be obtained, but it cannot measure single particle diameter on substrate
Solution Approach 1:
The patent extracts the single-particle measurement capability from the bulk statistical measurement approach of dynamic laser scattering. By using optical scattering on substrates and analyzing individual particle signals, the method isolates single-particle information to enable precise diameter measurement of individual particles rather than just statistical distributions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves high contrast, low cost, low time consumption, and no damage to samples, enabling accurate and precise measurement of these materials.
Implementation Method 1
controlling a light source to be obliquely incident onto a low-dimensional material to be observed and a substrate at a set angle, wherein the set angle is able to enable a light receiving device located above or below the low-dimensional material to be observed to only receive the light scattered by the low-dimensional material to be observed
Data Source
AI summary
The present invention discloses a method and system for determining a key dimension of a low-dimensional material by optical scattering. The method includes: controlling a light source to be obliquely incident onto a low-dimensional material to be observed and a substrate at a set angle, wherein the set angle is able to enable a light receiving device located above or below the low-dimensional material to only receive light scattered by the low-dimensional material; converting the received scattered light into an optical image; obtaining a brightness value of each pixel in the optical image, and establishing a correspondence relationship between a position and brightness; calculating a contrast based on the correspondence relationship between the position and the brightness, and determining the key dimension of the low-dimensional material based on a pre-calibrated correspondence relationship between the contrast and the key dimension of the low-dimensional material.