Optical Sensor End Position Detection for Transfer Devices

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Solution Overview

Problem

Existing substrate processing systems face challenges in accurately and automatically adjusting the position of transfer devices, leading to inefficiencies and variations in supervising results, particularly in detecting end positions during transfer operations.

Innovation Solution

The implementation of an optical sensor system with light emitting and receiving parts on the transfer device's holding part, which radiates light and detects changes in intensity to automatically specify end positions, allowing for precise adjustment of the transfer device's operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual visual checks are used to detect end positions, then the operation steps are simple, but the measurement precision and reliability are low

Engineering Contradiction:

Improveend position detection accuracyVSAvoidoptical sensor system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces manual visual inspection with an optical sensor system that uses light emission and detection to automatically determine end positions. The light emitting part radiates light and the light receiving part detects reflected light intensity changes, substituting human visual judgment with automated optical measurement, thereby improving measurement precision while maintaining operational simplicity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The transfer device performs self-positioning by using its own integrated optical sensor system to automatically detect end positions during transfer operations. The system supervises and adjusts its own position without requiring external manual intervention, improving both measurement accuracy and operational efficiency.

Inventive Principle:

Principle #25Self-service

2Productivity

If automated optical sensing is implemented, then the productivity and measurement precision improve, but the device complexity increases

Engineering Contradiction:

Improvetransfer operation efficiencyVSAvoidcontrol system complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent combines the light emitting part and light receiving part into an integrated optical sensor system that is incorporated directly into the transfer device structure. This merging of functions reduces the need for separate control systems and external equipment, thereby improving productivity while limiting the increase in overall device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The optical sensor system serves multiple functions: it detects end positions, supervises transfer operations, and provides feedback for automatic positioning adjustments. This multi-functionality improves productivity by consolidating several operations into one integrated system rather than requiring multiple separate devices.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Reliability

If automatic position adjustment is implemented, then the reliability and measurement precision improve, but the ease of operation decreases

Engineering Contradiction:

Improvetransfer operation reliabilityVSAvoidsystem operation simplicity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent implements a feedback mechanism where the light receiving part continuously monitors reflected light intensity and automatically adjusts the transfer device position based on detected end positions. This closed-loop feedback system improves reliability by ensuring accurate positioning while maintaining ease of operation through automation, eliminating the need for manual adjustment interventions.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables automatic and precise adjustment of transfer device positions, reducing the number of operation steps and variations in supervising results, compared to manual visual checks, thereby enhancing the accuracy and efficiency of transfer operations in substrate processing systems.

Implementation Method 1

acquiring a change in intensity of a first reflected light reflected off a first object by radiating a light from the light emitting part toward the first object below the holding part and receiving the first reflected light reflected off the first object by the light receiving part

Methodology Applied

Scientific EffectLight reflection: Reflection

Data Source

PatentUS11495482B2Automatic supervising method and control device

Publication Date: 2022.11.08 TOKYO ELECTRON LTD

AI summary

There is provided a method of automatically supervising a transfer operation of a transfer device including an optical sensor, the optical sensor having a light emitting part and a light receiving part provided in a head of a holding part for holding a substrate, the method including: acquiring a change in intensity of a first reflected light reflected off a first object by radiating a light from the light emitting part toward the first object below the holding part and receiving the first reflected light reflected off the first object by the light receiving part, while horizontally moving the holding part; and specifying an end position of the first object based on the change in intensity of the first reflected light.