Optical Sensor Mapping for Substrate Transfer Robot Height Teaching
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Solution Overview
Problem
Substrate transfer robots face challenges in accurately determining the height positions of substrate placing portions, leading to potential interference during substrate handling due to assembling or machining errors, requiring manual teaching that is labor-intensive and prone to errors.
Innovation Solution
The implementation of mapping sensor technology, utilizing a substrate transfer hand with multiple optical sensors to automatically detect and store the height positions of substrate placing portions, allowing the robot to avoid interference and accurately position itself without additional hardware.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual teaching is used to teach height positions of substrate placing portions to the substrate transfer robot, then the robot can be taught the positions, but the teaching work is significantly onerous and time-consuming for the operator
Solution Approach 1:
The patent replaces the manual mechanical teaching operation with an optical detection system. The mapping sensor (optical sensor) automatically detects the height positions of substrate placing portions by measuring light blockage, substituting the manual teach pendant operation with automated optical measurement. This resolves the contradiction by eliminating the time-consuming manual teaching process while maintaining precise height position detection.
Solution Approach 2:
The substrate transfer robot performs self-teaching by automatically using the mapping sensor to detect and store height positions of substrate placing portions without operator intervention. The system teaches itself the necessary positional information through automated optical detection, eliminating the need for manual teaching operations and significantly reducing teaching time while preserving measurement precision.
2Productivity
If the substrate transfer robot approaches the substrate to transfer it, then the substrate can be transferred, but the substrate transfer hand may interfere with the substrate when the substrate is tilted from horizontal orientation
Solution Approach 1:
The patent applies preliminary action by teaching the height positions of substrate placing portions to the robot before the actual substrate transfer operation. The mapping sensor detects and stores the vertical positions of all substrate placing portions in advance, enabling the robot to calculate the substrate orientation and plan an interference-free approach path before attempting to transfer the substrate, thus ensuring both productivity and reliability.
Solution Approach 2:
The system uses feedback from the mapping sensor's height position detection to adjust the robot's approach strategy. By continuously referencing the taught height positions, the robot can determine the substrate's tilt state and modify its motion path accordingly, providing feedback-based control that prevents interference while maintaining efficient substrate transfer operations.
3Extent of automation
If multiple optical sensors are used to detect height positions at different locations, then automatic teaching becomes possible, but the device complexity increases
Solution Approach 1:
The patent applies universality by using a single type of mapping sensor (transmissive optical sensor) for multiple detection locations on the substrate transfer hand. The same sensor model is mounted at different positions (first end portion, second end portion, and intermediate positions) to detect height positions of multiple substrate placing portions. This multi-functional use of identical sensors achieves automatic teaching capability while minimizing device complexity through component standardization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables automated teaching of substrate placing portion heights, reducing operator workload and minimizing errors by using existing optical sensors to detect and store precise height positions, ensuring accurate substrate handling and preventing interference with pillar portions.
Implementation Method 1
a first optical sensor configured to detect an object that blocks a first optical path, the first optical path connecting the first end portion and the second end portion
Data Source
AI summary
A controller: selects one optical sensor to use from among a first optical sensor and at least one second optical sensor; moves a substrate transfer hand to a detection start position at which an optical path of the selected optical sensor is positioned above a substrate placing portion and does not interfere with a pillar portion; lowers the substrate transfer hand from the detection start position to a detection position at which an object is detected by the optical sensor; and stores, as a height position of the substrate placing portion, a height of the optical path of the optical sensor from a predetermined positional reference when the substrate transfer hand is at the detection position.