Optical Sensor Substrate Detection for Multi-Stage Transfer
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Solution Overview
Problem
Existing substrate detection systems require multiple optical sensors to accurately detect the presence and alignment of multiple substrates during multi-stage processing, leading to increased costs and limited space usage in semiconductor manufacturing, which can result in reduced accuracy and increased risk of substrate damage.
Innovation Solution
A substrate detection apparatus using a reduced number of optical sensors, where at least one pair is disposed to sequentially block and receive light at each substrate, allowing for collective detection of multiple substrates' presence and alignment through changes in detection signals and support part movement, enabling accurate positioning without the need for individual sensors for each substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If individual optical sensors are installed for every substrate in multi-stage processing, then detection accuracy is improved, but device complexity and cost increase
Solution Approach 1:
A single optical sensor is designed to perform multiple detection functions for multiple substrates during multi-stage processing. The sensor detects presence and alignment of different substrates at different processing stages, replacing the need for individual sensors for each substrate while maintaining detection accuracy through strategic positioning and timing of detections.
Solution Approach 2:
Multiple detection functions that would traditionally require separate optical sensors are merged into a single optical sensor system. The sensor is positioned to detect multiple substrates sequentially or simultaneously during their respective processing stages, combining what would be separate detection tasks into one unified detection mechanism.
2Reliability
If multiple optical sensors are installed to detect multiple substrates, then detection reliability is improved, but space requirements increase
Solution Approach 1:
The detection system transitions from a horizontal arrangement of multiple sensors to a vertical multi-stage processing configuration. A single optical sensor detects substrates at different vertical levels or at different stages of processing, utilizing the vertical dimension and temporal sequence to reduce the horizontal space footprint while maintaining comprehensive detection coverage.
Solution Approach 2:
The optical sensor acts as an intermediary that detects substrates indirectly through their interaction with light during transfer and processing. By positioning the sensor to detect light blocking or reflection patterns as substrates pass through defined zones, the system achieves reliable detection without requiring physical sensors at every substrate location.
3Device complexity
If fewer optical sensors are used, then cost and space are reduced, but detection precision may deteriorate
Solution Approach 1:
The single optical sensor is strategically positioned and configured to detect substrates before potential misalignment or damage occurs during transfer. The sensor detects presence and alignment in advance, allowing the system to correct or adjust positioning before the substrate enters critical processing zones, thereby maintaining high detection precision with minimal sensors.
Solution Approach 2:
The optical sensor provides real-time feedback on substrate presence and alignment during multi-stage processing. This feedback mechanism allows the control system to monitor and adjust substrate positioning dynamically, ensuring detection precision is maintained even with a reduced number of sensors by continuously monitoring critical parameters throughout the processing sequence.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures reliable detection of substrate presence and alignment with fewer sensors, reducing costs and space requirements while maintaining high accuracy and preventing substrate damage during transfer.
Implementation Method 1
at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates
Data Source
AI summary
There is provided a substrate detection apparatus of detecting whether or not a substrate is normally supported by a support part at a predetermined position, in a transfer device including the support part configured to support a plurality of disc-like substrates in multi-stage processing at vertical intervals. The substrate detection apparatus includes: a plurality of optical sensors, each of the plurality of optical sensors including a light transmitting part configured to irradiate a light and a light receiving part configured to receive the light from the light transmitting part, wherein at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates, during the plurality of disc-like substrates is collectively transferred while being normally supported by the support part at the predetermined positions.