Optical Inspection of Substrate Holding Member Deformation
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Solution Overview
Problem
Current methods for inspecting deformation in substrate holding members of substrate transport apparatuses are inefficient, relying on visual inspections that are subjective and difficult to perform due to the narrow and dark environment, and fail to accurately detect local deformations.
Innovation Solution
An optical detection system with a light emitter and receiver is used to emit detection light across the path of a moving substrate holding member, acquiring correlation data on position changes to determine deformation, including the use of data processing to calculate second-order derivatives and display graphs for analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If visual inspection is used to detect fork deformation, then the inspection can be performed with simple equipment, but the measurement precision and reliability are insufficient due to narrow and dark inspection environment
Solution Approach 1:
The patent replaces manual visual inspection with an optical measurement system. A light source emits light that reflects off the fork surface, and a sensor detects the reflected light to measure fork position and deformation automatically. This substitution of mechanical/optical system for manual inspection resolves the contradiction by providing high measurement precision while maintaining relatively simple device complexity.
Solution Approach 2:
The patent introduces light as an intermediary to detect fork deformation. The light reflects off the fork surface and carries information about fork position and shape to the sensor. This intermediary enables precise measurement in the narrow and dark inspection environment without requiring direct visual access, resolving the contradiction between simple equipment and high measurement precision.
2Ease of manufacture
If manual visual inspection is performed by operators, then the inspection method is simple to implement, but the productivity is low due to heavy operator burden and time-consuming inspection process
Solution Approach 1:
The patent implements an automatic inspection system where the optical measurement device performs deformation detection without operator intervention. The system automatically measures fork position, calculates deformation, and determines pass/fail status. This self-service approach resolves the contradiction by maintaining simple implementation while dramatically improving productivity through automation.
Solution Approach 2:
The patent replaces manual inspection operations with an automated optical measurement system. The system automatically positions the light source and sensor, performs measurements, processes data, and generates inspection results. This substitution resolves the contradiction by eliminating operator burden and time-consuming manual inspection while keeping the system relatively simple to implement.
3Extent of automation
If optical sensor forms horizontal light path to inspect holding arms posture, then the inspection can be performed automatically, but the measurement precision for local deformation is insufficient
Solution Approach 1:
The patent segments the inspection process into multiple measurement points along the fork length. The optical sensor takes measurements at different positions, and the system calculates deformation for each segment. This segmentation enables detection of local deformations rather than only overall posture, resolving the contradiction between automation and local deformation measurement precision.
Solution Approach 2:
The patent measures fork deformation in multiple dimensions by detecting light reflection at various angles and positions. The system calculates not only vertical position but also horizontal position and orientation of fork segments. This multi-dimensional measurement approach resolves the contradiction by enabling precise local deformation detection while maintaining automation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for precise and automatic detection of deformation, reducing operator burden and improving accuracy, enabling reliable inspection of substrate holding members without the need for manual visual inspection in confined spaces.
Implementation Method 1
an optical detection unit having a light emitter and a light receiver, the optical detection unit being configured to emit by the light emitter a detection light to the substrate holding member, configured to receive by the light receiver the detection light affected by the substrate holding member
Data Source
AI summary
Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.