Optical Substrate Multi-Layer Etching Lens Shape Control

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Solution Overview

Problem

Existing liquid crystal devices face challenges in forming ideal lens surfaces with high light utilization efficiency due to a constant etching rate of light-transmitting layers, making it difficult to adjust the shape of micro-lenses effectively.

Innovation Solution

The optical substrate features a light-transmitting layer with varying etching rates across multiple layered films, allowing for the formation of concave portions with edges that contact adjacent concave portions, and a lens layer that fills these concave portions, enabling the creation of desired lens shapes and improving light collection efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a constant etching rate is used for the light-transmitting layer, then the manufacturing process is simple, but the lens surface shape cannot be adjusted to achieve high light utilization efficiency

Engineering Contradiction:
Improvelens surface shape precisionVSAvoidlight-transmitting layer structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The light-transmitting layer is divided into multiple sub-layers (first light-transmitting layer and second light-transmitting layer), each with different etching rates. This segmentation allows independent control of etching rates for different portions of the lens formation process, enabling precise adjustment of the lens surface shape while maintaining manufacturing feasibility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the light-transmitting layer are assigned different etching rates through the multi-layer structure. The first light-transmitting layer has a first etching rate and the second light-transmitting layer has a second etching rate, allowing local optimization of the lens surface curvature and shape in different areas to achieve ideal light collection efficiency.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If gaps are left between adjacent concave portions, then the manufacturing process is easier, but light collection directionality and utilization efficiency are reduced

Engineering Contradiction:
Improveconcave portion edge alignmentVSAvoidconcave portion formation process
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The etching process is made dynamic through multi-stage etching with different conditions. The first etching forms initial concave portions, then intermediate processing adjusts the shape, and the second etching refines the concave portions to achieve edge contact. This dynamic process enables precise control of concave portion dimensions and positioning to eliminate gaps while maintaining manufacturability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The mask pattern is designed with preliminary dimensions that account for the multi-stage etching process. The mask opening size and position are pre-calculated to ensure that after sequential etching with different rates and conditions, the final concave portions will have edges that contact each other without gaps, achieving precise alignment.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for the adjustment of lens shapes and enhances light utilization efficiency by ensuring that the edges of concave portions are in contact, eliminating gaps and improving light collection directionality.

Implementation Method 1

a lens layer 52 is disposed so as to fill the concave portion 51a

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Data Source

PatentUS11635652B2Optical substrate, electro-optical device, electronic apparatus, and method for manufacturing optical substrate
Publication Date: 2023.04.25 SEIKO EPSON CORP
  • US11635652B2 patent drawing
  • US11635652B2 patent drawing
  • US11635652B2 patent drawing

AI summary

An optical substrate includes a first substrate, a light-transmitting layer disposed at the first substrate, concave portions provided in the light-transmitting layer, and a lens layer disposed so as to fill the concave portions. The light-transmitting layer is constituted by a plurality of light-transmitting layers, and an edge of the concave portion is in contact with an edge of an adjacent concave portion adjacent to the concave portion.