Optical Substrate Region Testing After Movement Misalignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate test methods struggle to accurately and efficiently ascertain the alignment state of substrates, particularly after movement, which can lead to deformation or misalignment during testing.
Innovation Solution
A substrate test method that involves loading a substrate into a test apparatus, testing a first region by ascertaining its alignment and irradiating light, moving the substrate, and then testing a second region with similar alignment verification and light irradiation, utilizing an optical camera and irradiation device for precise alignment and reflection measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is moved after testing the first region to test the second region, then multiple regions can be tested, but the substrate alignment state may change leading to inaccurate testing
Solution Approach 1:
The patent performs alignment verification using an optical camera before testing each region. This preliminary action of checking alignment ensures that any misalignment caused by substrate movement is detected and corrected before the actual test, thereby maintaining measurement precision while enabling multi-region testing
Solution Approach 2:
The patent implements a feedback mechanism where the alignment state is continuously monitored using optical imaging before each test region. This feedback allows the system to detect alignment deviations caused by substrate movement and adjust accordingly, resolving the contradiction between moving the substrate for productivity and maintaining alignment precision
2Measurement precision
If alignment is verified before each region test, then testing accuracy is improved, but testing time increases
Solution Approach 1:
The patent replaces complex mechanical alignment systems with optical imaging methods. The optical camera captures images of alignment marks, and software algorithms automatically determine alignment accuracy, which is faster and more precise than traditional mechanical alignment verification methods
Solution Approach 2:
The patent changes the measurement parameter from mechanical position detection to optical image analysis. By capturing images and analyzing alignment mark positions through image processing, the system achieves rapid alignment verification that does not significantly increase testing time while improving accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for exact alignment state verification of substrates before and after movement, ensuring accurate and prompt testing even when substrates experience deformation, thereby reducing costs and improving testing efficiency.
Implementation Method 1
using an optical irradiation device to irradiate light to a first cell of a substrate; receiving light reflected from the first cell
Data Source
AI summary
The present disclosure relates to substrate test methods. An example substrate test method comprises loading a substrate into a substrate test apparatus and testing the substrate in the substrate test apparatus. The step of testing the substrate includes testing a first region of the substrate, and testing a second region of the substrate after testing the first region. The step of testing the first region includes determining that the first region is aligned and irradiating light to the first region. The step of testing the second region includes determining that the second region is aligned and irradiating light to the second region.