Optical Substrate with Hierarchical Nanostructures for Signal Enhancement

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Solution Overview

Problem

Current nanotechnology processes for enhancing the surface roughness of optical substrates for biomedical optoelectronics are cumbersome and complex, making it difficult to meet industry requirements for improved Raman scattering and fluorescence signals.

Innovation Solution

A method involving the formation of first nanostructures on a substrate, followed by the creation of second nanostructures through an etching process, and the deposition of a metal structure on these second nanostructures to increase surface roughness, enhancing Raman scattering and fluorescence signals, while simplifying the fabrication process for mass or large-area production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional nanotechnology processes are used to improve surface roughness, then Raman scattering signal is enhanced, but the fabrication process becomes cumbersome and complicated

Engineering Contradiction:
Improvesurface roughnessVSAvoidfabrication process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The fabrication process is segmented into distinct stages: forming first nanostructures on the substrate, performing etching to create second nanostructures on the first nanostructures, and depositing metal structures. This segmentation allows each stage to be optimized independently while achieving the desired complex surface morphology for enhanced Raman scattering.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first nanostructures are formed preliminarily on the substrate before the etching process. This preliminary action provides a structured foundation that guides the subsequent etching to create the second nanostructures, ensuring precise control over the final surface topology without requiring complex real-time processing.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If complex nanotechnology processes are used to enhance surface roughness, then optical enhancement is achieved, but productivity and mass production capability are reduced

Engineering Contradiction:
Improvesurface roughnessVSAvoidmass production capability
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Multiple functions are merged into a unified fabrication approach: the formation of hierarchical nanostructures and metal deposition are integrated into a coordinated process sequence. This merging allows the complex surface structures to be created using standard semiconductor manufacturing techniques that are inherently suitable for mass production.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The fabrication process utilizes controllable parameters in each stage (nanostructure formation conditions, etching parameters, metal deposition thickness) to achieve the desired surface roughness. By optimizing these parameters, the process can be scaled for large-area production while maintaining consistent optical enhancement properties across the substrate.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach results in a multifunctional optical substrate with significantly enhanced Raman scattering and fluorescence signals, suitable for biomedical applications, and facilitates a simpler, more efficient production process compared to conventional methods.

Implementation Method 1

An etching process is performed to form a plurality of second nanostructures on a surface of the plurality of first nanostructures away from the substrate

Methodology Applied
Scientific EffectEtching:

Implementation Method 2

A metal structure is formed on a surface of the plurality of second nanostructures

Methodology Applied
Scientific EffectMetal deposition: Deposition (physical)

Implementation Method 3

the roughness of the surface of the substrate is increased. Thereby, the effect of surface enhanced Raman scattering is achieved

Methodology Applied
Scientific EffectRaman scattering:

Implementation Method 4

the optical substrate of the invention can also achieve the effect of enhancement on fluorescence intensity simultaneously

Methodology Applied
Scientific EffectFluorescence enhancement: Fluorescence

Data Source

PatentUS11237306B2Method of fabricating optical substrate
Publication Date: 2022.02.01 NATIONAL TSING HUA UNIVERSITY
  • US11237306B2 patent drawing
  • US11237306B2 patent drawing
  • US11237306B2 patent drawing

AI summary

An optical substrate including a substrate, a plurality of first nanostructures, and a metal structure is provided. The plurality of first nanostructures are located on the substrate, wherein a surface of the plurality of first nanostructures away from the substrate has a plurality of second nanostructures. The metal structure is located on a surface of the plurality of second nanostructures. A method of fabricating the optical substrate is also provided.