Optical Surface Scanning for Precision Metrology
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Solution Overview
Problem
Manufacturing of complex, high-value products is hindered by uncertainties in material properties and equipment performance due to inadequate metrology for inspecting and monitoring environmental effects on manufacturing equipment, leading to inconsistencies and resource wastage.
Innovation Solution
A non-contact, line-by-line scanning system using laser displacement sensors or white-light confocal fiber sensing systems for precise topological measurement of surfaces, enabling quick and high-resolution inspections without compromising sampling rate or resolution, and correcting for errors such as leveling and sensor tilt.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional stylus profilometer is used for surface measurement, then measurement precision is maintained, but scan speed decreases and productivity is reduced
Solution Approach 1:
The patent replaces the mechanical contact-based stylus profilometer with a non-contact optical measurement system using laser displacement sensors or white-light confocal fiber sensing systems. This substitution eliminates mechanical contact, enabling faster scanning speeds while maintaining measurement precision through optical detection methods.
Solution Approach 2:
The patent implements periodic scanning of surface profiles at multiple locations to monitor progressive changes over time. This periodic measurement approach enables efficient data collection for preventive maintenance scheduling without requiring continuous monitoring, thus improving productivity while maintaining measurement accuracy.
2Reliability
If comprehensive metrology equipment is deployed to monitor all equipment conditions, then reliability improves, but device complexity increases
Solution Approach 1:
The patent employs a multi-functional metrology system that can measure various surface parameters (roughness, profile, flatness) using the same optical sensor platform. This universal measurement capability reduces the need for multiple specialized instruments, thereby improving reliability through comprehensive monitoring while minimizing device complexity.
Solution Approach 2:
The system performs self-diagnosis and automated analysis of surface measurement data, generating alerts when deviations indicate potential equipment failures. This self-service capability reduces the need for complex manual monitoring systems while maintaining high reliability through automated detection and reporting.
3Manufacturing precision
If frequent preventive maintenance is performed to ensure consistent product quality, then product quality improves, but loss of time increases
Solution Approach 1:
The patent implements continuous surface profile monitoring that detects early signs of degradation before they affect product quality. By identifying surface changes at incipient stages, the system enables maintenance to be performed only when necessary, reducing unnecessary downtime while ensuring product quality consistency through early intervention.
Solution Approach 2:
The system provides real-time feedback on surface condition changes, enabling dynamic adjustment of maintenance schedules based on actual equipment state rather than fixed intervals. This feedback-driven approach optimizes the balance between maintaining product quality and minimizing equipment downtime by performing maintenance only when surface deviations indicate potential quality issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high-throughput topological studies with improved equipment maintenance, reducing unscheduled downtime, extending equipment lifespan, and ensuring consistent product quality by accurately monitoring surface changes and environmental impacts.
Implementation Method 1
an optical detector configured to scan a target surface of a piece of equipment and generate a plurality of line scan images of the target surface
Implementation Method 2
A non-contact, line-by-line scanning system using laser displacement sensors or white-light confocal fiber sensing systems for precise topological measurement of surfaces
Implementation Method 3
laser displacement sensors or white-light confocal fiber sensing systems for precise topological measurement
Data Source
AI summary
A method for scanning and analyzing a surface, the method comprising: receiving a piece of equipment with a target surface for inspection; receiving an input from a user; determining at least one scan parameter based on the user input; scanning the target surface using an optical detector in accordance with the at least one scan parameter; generating an image of the target surface; correcting the image of the target surface to remove at least one undesired feature to generate a corrected image based on the at least one scan parameter; and analyzing the corrected image to determine at least one geometric parameter of the target surface.