Optical System Heat Dissipation Arrangement
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Solution Overview
Problem
High luminous power density in optical systems leads to temperature increases, causing expansion, deformation, and stray light issues that affect imaging properties, with existing cooling methods transmitting mechanical vibrations and having limitations in heat dissipation.
Innovation Solution
An optical system with a heat dissipation element arranged without direct contact to the optical element, using active cooling with a circulating medium or convection/thermal radiation, and strategically positioned to decouple stress and maximize heat transfer area, often using high thermal conductivity materials like aluminum.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If direct contact cooling is used between the heat dissipation element and optical element, then heat dissipation efficiency is improved, but mechanical vibrations are transmitted to the optical element causing deformation
Solution Approach 1:
A holder element is introduced as an intermediary component between the optical element and the heat dissipation element. The holder element provides thermal conduction path while mechanically isolating the optical element from vibrations generated by the active cooling system, thus resolving the contradiction between heat dissipation efficiency and imaging quality
Solution Approach 2:
The patent replaces direct mechanical contact cooling with a indirect cooling system that uses a circulating cooling medium. This substitution eliminates mechanical vibrations transmitted through direct contact while maintaining effective heat dissipation through thermal conduction via the holder element and convection through the cooling medium
2Productivity
If high luminous power density is used, then productivity is improved, but temperature increase causes expansion and deformation of optical elements
Solution Approach 1:
The active cooling system with circulating cooling medium is activated before and during high-power operation to preemptively remove heat from optical elements. This preliminary cooling action prevents temperature-induced expansion and deformation that would otherwise occur during high luminous power density operation
Solution Approach 2:
The system dynamically adjusts cooling parameters such as cooling medium flow rate and temperature to match the luminous power density level. During high-power operation, cooling intensity is increased to maintain optimal temperature parameters, thus preventing thermal deformation while enabling high productivity
3Temperature
If cooling passages are integrated into the holder element, then heat dissipation is improved, but mechanical strength is reduced due to openings and slots
Solution Approach 1:
The cooling function is segmented from the holder element structure. Instead of integrating cooling passages into the holder element, the patent uses a separate active cooling system with circulating cooling medium that interfaces with the holder element's outer surface, thus maintaining holder element mechanical strength while achieving effective heat dissipation
Solution Approach 2:
The holder element maintains its structural integrity as a solid component without internal passages. The cooling medium flows through external channels or contacts the outer surface of the holder element, allowing heat dissipation through the holder element's thin walls without compromising its mechanical strength through internal openings or slots
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effective cooling is achieved without mechanical vibration transmission, maintaining imaging quality by efficiently dissipating heat and reducing thermal drift, suitable for high-power applications like microlithographic projection exposure and laser material processing.
Implementation Method 1
heat dissipation element to at least partially dissipate thermal energy generated in the optical element
Implementation Method 2
dissipated to the outside environment, for example by way of cooling ribs on the optical system, by way of convection or thermal radiation
Implementation Method 3
dissipated to the outside environment, for example by way of cooling ribs on the optical system, by way of convection or thermal radiation
Implementation Method 4
particularly effective cooling is effected for example by an active cooling device having a circulating cooling medium
Data Source
AI summary
An optical system, such as an illumination system, includes an optical arrangement having at least one optical element and at least one heat dissipation element configured to at least partially dissipate thermal energy generated in the optical element(s) to the outside environment of the optical system. The heat dissipation element(s) is(are) arranged without direct contact with the optical element(s).