Optical Source Temperature Sensing in TLE Under Extreme Heat
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Solution Overview
Problem
Existing thermal laser epitaxy (TLE) systems face challenges in accurately measuring high temperatures exceeding 2000-3000 °C due to the limitations of conventional temperature sensors and intense laser radiation, which makes direct contact measurements impractical.
Innovation Solution
A method using an optical detector system with a camera unit and processing unit to capture thermal radiation images, determine intensity, and calibrate the relationship between intensity and temperature, allowing for precise temperature measurement without direct contact, utilizing a calibration based on the melting point of the source material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional temperature sensors (thermoelements) are used to measure source material temperature, then direct temperature measurement is possible, but the sensors cannot withstand temperatures above their melting points (exceeding 2000-3000 °C)
Solution Approach 1:
The patent introduces an optical intermediary (camera system detecting thermal radiation) between the measurement target and the detection device. Instead of placing a sensor directly in contact with the hot source material, the system uses optical radiation as an intermediary carrier to transmit temperature information from the source material to the camera-based detector, allowing measurement without direct thermal contact.
Solution Approach 2:
The patent replaces the mechanical/contact-based temperature measurement system (thermoelements requiring physical contact) with an optical/non-contact measurement system. The camera-based thermal radiation detection eliminates the need for mechanical insertion of sensors into the high-temperature zone, substituting optical field interaction for mechanical contact.
2Measurement precision
If direct contact temperature measurement is attempted in the high-intensity laser radiation zone, then temperature data can be obtained, but the intense laser radiation and evaporating material create additional measurement challenges and potential damage
Solution Approach 1:
The optical system serves as an intermediary that allows remote detection of thermal radiation without exposing the detector to harmful laser radiation or evaporating material. The camera system captures thermal emission from the source material through optical paths that avoid direct exposure to the intense laser beam and vapor plume, isolating the detector from harmful environmental factors.
Solution Approach 2:
The patent creates an optical copy or image of the thermal radiation emitted by the source material using the camera system. Instead of directly measuring the source material in its harsh environment, the system captures an optical representation (thermal image) that can be analyzed to determine temperature, effectively copying the thermal information without exposing measurement equipment to dangerous conditions.
3Reliability
If optical detector system with calibration is used for non-contact temperature measurement, then continuous temperature measurement at high temperatures exceeding 2000-3000 °C can be achieved, but the system complexity increases compared to simple contact sensors
Solution Approach 1:
The patent utilizes changes in thermal radiation parameters (intensity, spectrum) with temperature as the basis for measurement. By detecting how the thermal radiation parameters change with temperature and using calibration curves to map these changes to absolute temperature values, the system achieves reliable high-temperature measurement despite the increased complexity of optical detection compared to simple electrical sensors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and continuous temperature measurement of source materials in TLE systems, ensuring stable and reproducible fluxes by adjusting the laser beam spot size based on determined temperatures, enhancing process stability and safety.
Implementation Method 1
a camera unit for capturing images of a thermal radiation of the source material
Data Source
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AI summary
The invention relates to a method for determining a temperature (70) of a source material (20) of a TLE system (10) by a temperature determination system (30) comprising an optical detector system (40) and a processing unit (60), wherein the optical detector system (40) comprises a camera unit (42) for capturing images (46) of a thermal radiation (32) of the source material (20) and further comprises optical elements (50) for transferring and/or altering the emitted thermal radiation (32) between the source material (20) and the camera unit (42), wherein the processing unit (60) is constructed for analyzing the images (46) captured by the optical detector system (40), wherein said analysis includes determining an intensity (80) of the thermal radiation (32) of the source material (20) in the images (46) captured by the optical detector system (40) and determining the temperature (70) of the source material (20) based on said determined intensity (80) by using a calibration. Further, the invention relates to a temperature determination system (30) capable of carrying out said method, and to a TLE system (10) comprising said temperature determination system (30).