Optical Threshold Sensing for Accurate Substrate Robot Pickup
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Solution Overview
Problem
Conventional systems fail to accurately determine the location of substrates during handling due to substrates transmitting light, leading to inaccurate placement and potential damage, especially when processing multiple types of substrates with varying optical properties.
Innovation Solution
A system comprising a first optical sensor with an emitting and receiving element to detect the optical transmission ratio of substrates, coupled with a processing device that determines an optical threshold for location determination, and uses machine learning to predict substrate properties and adjust settings automatically.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional optical sensors are used to detect substrate location, then the system can operate with simple detection mechanisms, but the substrate location determination becomes inaccurate when substrates transmit light
Solution Approach 1:
The system changes the optical parameters by detecting optical transmission ratio instead of simple light blockage. The processing device determines substrate location by analyzing the ratio of transmitted light intensity to emitted light intensity, which provides accurate detection even when substrates are transparent or translucent to light.
2Adaptability or versatility
If the system processes multiple types of substrates with varying optical properties, then the system versatility increases, but the measurement accuracy decreases due to different transmission characteristics
Solution Approach 1:
The system uses feedback by continuously monitoring the optical transmission ratio and using this information to determine substrate location. The processing device receives optical transmission data from the optical sensor and uses this feedback to accurately determine substrate position regardless of the substrate type or its specific optical properties.
3Measurement precision
If manual adjustment of optical thresholds is performed for different substrate types, then the measurement precision can be maintained, but the productivity decreases due to manual intervention
Solution Approach 1:
The system performs self-service by automatically determining the optical threshold based on the detected optical transmission ratio. The processing device autonomously calculates the threshold without requiring manual intervention, thereby maintaining measurement precision while increasing productivity and manufacturing throughput.
4Ease of operation
If substrate location is inaccurately determined during handling, then the handling process remains simple, but the manufacturing precision and substrate quality deteriorate
Solution Approach 1:
The system introduces an intermediary processing device that acts as a mediator between the simple optical sensor and the substrate handling system. This processing device calculates the optical transmission ratio and determines substrate location, thereby improving manufacturing precision while keeping the overall handling process relatively simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurately determines substrate location, reduces handling errors, and increases manufacturing throughput by automatically adapting to different substrate types based on their optical properties.
Implementation Method 1
a first optical sensor that includes an emitting element and a receiving element. The first optical sensor is configured to detect an optical transmission ratio of a substrate responsive to a substrate support supporting the substrate in an optical path of the first optical sensor
Data Source
AI summary
A system includes an optical sensor including an emitting element and a receiving element. The optical sensor is configured to detect an optical transmission ratio of a substrate responsive to a substrate support supporting the substrate in an optical path of the first optical sensor. The system further includes a processing device communicatively coupled to the optical sensor. The processing device is configured to determine an optical threshold based on the optical transmission ratio of the substrate. The processing device is further configured to determine a location of the substrate relative to a substrate-handling robot end effector based on sensor data output by a location sensor and the optical threshold.