Optical Instrument Transfer Apparatus with Wedge Stage Module
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Solution Overview
Problem
Existing apparatuses for transferring optical instruments in semiconductor manufacturing face challenges in maintaining accuracy and safety due to increased distance from the granite surface plate, leading to excessive load on motors and potential defects in wafer pattern alignment.
Innovation Solution
A slimmed-down apparatus with a transferring block coupled to a granite surface plate, featuring a wedge stage module for vertical movement and a horizontal stage module for guiding in two degrees of freedom, minimizing motor load and optimizing the distance between the optical instrument and the granite surface plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a transferring apparatus is introduced to move the optical instrument, then the optical instrument can be positioned for overlay measurement, but the distance between the optical instrument and the granite surface plate increases, degrading safety and accuracy
Solution Approach 1:
The transferring apparatus is divided into separate functional modules: a wedge stage module for vertical movement, a horizontal stage module for horizontal positioning, and a transferring block to hold the optical instrument. This segmentation allows each module to be optimized for its specific function while maintaining overall compactness.
Solution Approach 2:
The horizontal stage module is nested within the transferring block structure, and the optical instrument is coupled to the front surface of the transferring block. This nested arrangement minimizes the overall distance between the optical instrument and the granite surface plate while maintaining positioning capability.
2Ease of operation
If the transferring apparatus supports all the weight of the optical instrument, then the optical instrument can be moved, but an excessive load is applied to the motor
Solution Approach 1:
The wedge stage module uses a wedge block with inclined surfaces that counterbalance the weight of the optical instrument. When the ball nut blocks move horizontally, they push the wedge block vertically, creating a mechanical advantage that reduces the motor load required to move the heavy optical instrument.
Solution Approach 2:
The wedge stage module converts horizontal movement of the ball nut blocks into vertical movement of the wedge block and transferring block. This dimensional transformation allows the motor to move the optical instrument horizontally with minimal load while still achieving the required vertical positioning.
3Manufacturing precision
If a wedge stage module with ball nut blocks is used to move the transferring block vertically, then the optical instrument can be positioned accurately, but the structure becomes more complex
Solution Approach 1:
The ball nut blocks serve multiple functions: they move horizontally along the ball screw, push the wedge block vertically through their inclined surfaces, and guide the transferring block vertically through the vertical guide. This multi-functionality reduces the need for separate components and simplifies the overall structure.
Solution Approach 2:
The wedge block acts as an intermediary between the ball nut blocks and the transferring block. It converts the horizontal movement of the ball nut blocks into vertical movement of the transferring block, while the vertical guide ensures accurate vertical positioning. This intermediary mechanism achieves precise positioning with a relatively simple structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances accuracy, reduces motor load, and ensures precise alignment by transmitting force only in the vertical direction, thereby improving safety and measurement accuracy.
Implementation Method 1
a wedge stage module disposed on the fixed block to move the transferring block in a vertical direction
Implementation Method 2
a pair of ball nut blocks that are symmetrically disposed move closer to or further away from each other
Implementation Method 3
a vertical guide disposed at a side end of the transferring block to guide the transferring block in the vertical direction
Implementation Method 4
a horizontal stage module connected between the wedge stage module and the transferring block to guide a movement in a horizontal direction
Data Source
AI summary
An apparatus for transferring an optical instrument, includes: a transferring block, wherein the optical instrument is coupled to a front surface thereof; a fixed block disposed at a rear side of the transferring block and coupled to a granite surface plate; a wedge stage module disposed on the fixed block to move the transferring block in a vertical direction; a vertical guide disposed at a side end of the transferring block to guide the transferring block in the vertical direction; and a horizontal stage module connected between the wedge stage module and the transferring block to guide a movement in a horizontal direction.