Optical Waveguide Fan-Out Design for Photonic Die Coupling

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Solution Overview

Problem

There is a need to improve the efficiency of optical signal coupling between a photonic die and an external fiber in semiconductor packages, as current methods are not optimal for long-range signal transmission.

Innovation Solution

The development of a waveguide with an input port and multiple output ports, where the propagating direction of the optical signal entering the input port is different from the propagating directions of the optical signals exiting the output ports, achieving a compact and simple design with reduced power mismatch.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional optical coupling methods are used between photonic die and external fiber, then coupling efficiency is limited, but device complexity and manufacturing difficulty remain manageable

Engineering Contradiction:
Improveoptical signal coupling efficiencyVSAvoidwaveguide structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The waveguide structure is divided into multiple functional sections: an input section receiving optical signals from external fibers, a fan-out section that splits the optical path into multiple directions, and output sections connecting to photonic components. This segmentation allows each section to be optimized independently for its specific function, improving overall coupling efficiency while maintaining manageable manufacturing complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The waveguide transitions from a conventional linear one-dimensional structure to a three-dimensional structure with vertical layers and lateral extensions. The fan-out section utilizes vertical stacking and lateral branching to achieve multi-directional optical signal distribution, enabling compact integration of multiple optical paths within a small footprint while improving coupling efficiency through optimized spatial arrangement

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If optical signal propagating direction is changed from input port to output ports, then compact fan-out design is achieved, but power mismatch increases

Engineering Contradiction:
Improvesemiconductor device footprintVSAvoidpower mismatch
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The waveguide structure implements local quality variations through tapered sections and graded index regions at critical transition points. The fan-out section features locally optimized geometries with gradual width changes and controlled curvature radii that minimize scattering and reflection losses. These local quality adjustments ensure smooth optical mode transformation when changing propagation directions, achieving compact 3D routing while maintaining low power mismatch of less than 0.1 dB

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The waveguide parameters such as cross-sectional dimensions, curvature radius, and material composition are continuously varied along the propagation path to optimize performance. The fan-out section employs parameter gradients that smoothly transition the optical mode from the input direction to multiple output directions, minimizing abrupt changes that would cause power mismatch. This continuous parameter optimization enables compact design with reduced energy loss

Inventive Principle:
Principle #35Parameter changes

3Productivity

If multiple output ports are integrated with different propagating directions, then optical signal distribution efficiency is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveoptical signal distribution efficiencyVSAvoidwaveguide alignment precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Multiple waveguide paths are merged into a single integrated fan-out structure that simultaneously provides multiple output directions. The waveguide layers are combined in a stacked configuration with precise lateral and vertical alignment, allowing multiple optical signals to be distributed in different directions from a single input. This merging approach improves distribution efficiency while the unified manufacturing process maintains consistent precision across all output ports

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The fan-out waveguide structure serves multiple functions simultaneously: it acts as a power splitter, a directional router, and a spatial multiplexer in a single component. The universal design uses standardized waveguide geometries and materials that can be replicated across different output ports, reducing manufacturing precision requirements through process standardization while achieving efficient multi-directional optical signal distribution

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables a compact fan-out design of semiconductor devices, reducing power mismatch to less than 0.1 dB, and facilitates efficient optical signal transmission between photonic and electronic components.

Implementation Method 1

an optical waveguide including an input port and a plurality of output ports, wherein a propagating direction of an optical signal entering the input port is different from propagating directions of optical signals exiting the output ports

Methodology Applied
Scientific EffectOptical waveguide: Waveguide (optics)

Data Source

PatentUS20250189720A1Optical waveguide, semiconductor device with optical waveguide, and methods of manufacturing the same
Publication Date: 2025.06.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250189720A1 patent drawing
  • US20250189720A1 patent drawing
  • US20250189720A1 patent drawing

AI summary

An optical waveguide includes a first portion, a second portion, and a third portion. The first portion includes an input port configured to allow an input optical signal of a first propagation direction entering therefrom. The second portion includes a taper waveguide portion configured to expanding the input optical signal and a rectangular waveguide portion configure to split the input optical signal, where the rectangular waveguide portion is connected to the taper waveguide portion. The third portion includes at least one output port configured to allow an output optical signal of an output propagation direction exiting therefrom, where the output propagation direction is different from the first propagation direction. The second portion is sandwiched between the first portion and the third portion.