Optical Waveguide Substrate With Curved Protrusions for Mask Protection
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Solution Overview
Problem
The breakage of protrusions on optical waveguides due to contact with masks during metal film deposition is a challenge in existing substrate technologies, particularly when the masks are placed above protrusions with right-angle corners.
Innovation Solution
The design of optical waveguides with protrusions that have smooth, corner-free perimeters on their upper and inclined surfaces, reducing the risk of breakage during mask contact by using curved line segments to connect these surfaces, thereby minimizing the likelihood of damage during the deposition process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask is placed above the protrusion for forming a metal film, then the metal film can be deposited on the inclined surface, but the mask may come into contact with the protrusion causing breakage
Solution Approach 1:
The protrusion is designed with a curved surface instead of sharp corners, where the perimeter in plan view consists of curved line segments without corners. This curvature eliminates stress concentration points that would occur with right-angle corners, preventing breakage when the mask contacts the protrusion during metal film deposition while maintaining manufacturing precision
2Ease of manufacture
If the protrusion has right-angle corners, then it is easier to manufacture with standard processes, but the corners are prone to breakage during mask contact
Solution Approach 1:
The protrusion perimeter is formed with curved line segments instead of straight lines meeting at right angles. This curvature design eliminates weak corner points while maintaining compatibility with standard manufacturing processes such as photolithography and etching, thus preserving ease of manufacture while significantly improving strength and breakage resistance
3Measurement precision
If the mask is placed close to the protrusion for precise metal film formation, then deposition accuracy improves, but the risk of contact and breakage increases
Solution Approach 1:
The curved surface of the protrusion allows the mask to be positioned closer for precise metal film deposition while the absence of sharp corners prevents stress concentration and breakage upon contact, thereby improving measurement precision without increasing mechanical damage risk
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly reduces the risk of protrusion breakage during metal film deposition, ensuring the integrity and functionality of the optical waveguides by preventing material damage at corners, thus enhancing the reliability of the substrate.
Implementation Method 1
a first metal film formed at least on the inclined surface of the first protrusion
Data Source
AI summary
A substrate with optical waveguide includes an interconnect substrate and an optical waveguide formed on the interconnect substrate, wherein the optical waveguide includes a first cladding layer, a first protrusion formed on the first cladding layer, the first protrusion having an upper surface and an inclined surface connected to, and sloping relative to, the upper surface, a first metal film formed at least on the inclined surface, a core layer formed on the first cladding layer such as to cover part of the first metal film, and a second cladding layer formed on the first cladding layer such as to cover the core layer, wherein in plan view, a perimeter of a first surface region constituted by both the upper surface and the inclined surface does not have a corner where two lines meet, except for a part thereof where the inclined surface meets the first cladding layer.