Optically Addressed Thermionic Electron Beam Source

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Solution Overview

Problem

Traditional electron beam sources are large, expensive, and require high energy, making them unsuitable for compact and cost-effective applications such as scanning electron microscopes, which limits their accessibility and usability in various fields.

Innovation Solution

A compact electron beam source utilizing a low-dimensional, electrically conductive material with anisotropic restricted thermal conductivity, which is optically heated by electromagnetic radiation to thermionically generate electrons, reducing power consumption and manufacturing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional thermionic cathodes are used to generate electron beams, then reliable electron emission is achieved, but the device becomes large, expensive, and energy-intensive

Engineering Contradiction:
Improveelectron emission reliabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSWeight of stationary object

Solution Approach 1:

The patent changes the physical state and dimensional parameters of the cathode material by using low-dimensional materials (2D materials like graphene, transition metal dichalcogenides, or 1D nanowires/nanotubes) with controlled thickness (1-100 nm) and aspect ratios (10:1 to 1000:1). This dimensional reduction fundamentally alters thermal transport properties, enabling compact device design while maintaining thermionic emission functionality through optically heated electron emission at reduced temperatures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite structures combining low-dimensional emissive materials with supporting substrates or matrices. The low-dimensional material is deposited on or integrated with a substrate that provides mechanical support while allowing optical penetration for heating. This composite approach enables the cathode to maintain structural integrity in a compact form factor while preserving electron emission capability

Inventive Principle:
Principle #40Composite materials

2Reliability

If traditional thermionic cathodes are used, then sufficient electron beam current is generated, but manufacturing cost and energy consumption increase significantly

Engineering Contradiction:
Improveelectron beam currentVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by stationary object

Solution Approach 1:

The patent replaces traditional electrical or resistive heating mechanisms with optical heating using electromagnetic radiation. The low-dimensional cathode material absorbs optical energy efficiently due to its high surface-area-to-volume ratio and optical properties, converting it directly into thermal energy for electron emission. This substitution reduces overall energy consumption and eliminates the need for complex electrical heating infrastructure

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent exploits the unique thermal transport parameters of low-dimensional materials, specifically their reduced thermal conductivity in certain directions due to confined phonon transport. This anisotropic thermal behavior allows localized heating with optical energy while minimizing heat diffusion to the substrate, improving heating efficiency and reducing the total energy required to achieve the emission temperature

Inventive Principle:
Principle #35Parameter changes

3Use of energy by stationary object

If low-dimensional materials with anisotropic thermal conductivity are used in the cathode, then power consumption is reduced, but manufacturing complexity may increase

Engineering Contradiction:
Improvepower consumptionVSAvoidcathode fabrication
Core Design Contradiction:
Use of energy by stationary objectVSEase of manufacture

Solution Approach 1:

The patent selects from a class of low-dimensional materials (graphene, transition metal dichalcogenides, nanowires, nanotubes) that share common synthesis methods and processing techniques. These materials can be produced through established techniques such as chemical vapor deposition, molecular beam epitaxy, or solution-based methods, allowing the same manufacturing infrastructure to produce multiple candidate materials. The universal processing approaches reduce the burden of manufacturing complexity despite the advanced material requirements

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a compact, low-cost electron beam source that can be easily integrated into devices, enabling high-resolution imaging at a lower cost, making advanced microscopy accessible to a broader range of applications and environments.

Implementation Method 1

the cathode thermionically emits free electrons when the cathode is illuminated by electromagnetic (EM) radiation

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Implementation Method 2

the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity

Methodology Applied
Scientific EffectAnisotropic thermal conductivity: Conduction (thermal)

Data Source

PatentUS10741352B2Optically addressed, thermionic electron beam device
Publication Date: 2020.08.11 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV
  • US10741352B2 patent drawing
  • US10741352B2 patent drawing
  • US10741352B2 patent drawing

AI summary

An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.