Opto-mechanical Resonator with Sub-wavelength Waveguide

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Solution Overview

Problem

Existing opto-mechanical resonators are sensitive to experimental conditions and require strict environments, limiting their practical application outside research settings, and they have limited coupling rates compared to prior art.

Innovation Solution

An opto-mechanical resonator with a deformable mechanical element that influences an optical signal through a sub-wavelength waveguide and Bragg mirrors, integrated on a substrate, which enhances coupling rates by varying the effective index of the waveguide during deformation, allowing for improved sensitivity and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If free space Fabry-Perot cavity is used, then optical resonance can be achieved, but the resonator is too sensitive to experimental conditions

Engineering Contradiction:

Improvestability of resonatorVSAvoidsensitivity to experimental conditions

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the free space mechanical cavity with an integrated photonic circuit waveguide system. The optical resonance is maintained through the photonic crystal cavity structure instead of mechanical mirrors, eliminating sensitivity to mechanical alignment and environmental vibrations while preserving optical resonance functionality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a photonic crystal waveguide as an intermediary between the light source and the resonance detection system. This waveguide confines and guides the optical signal through the suspended region, enabling indirect measurement of mechanical deformation through optical phase changes without direct mechanical contact.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Volume of moving object

If ring microresonator is used, then miniaturization is achieved, but the coupling ratio is limited

Engineering Contradiction:

Improvesize of resonatorVSAvoidcoupling ratio

Core Design Contradiction:

Volume of moving objectVSMeasurement precision

Solution Approach 1:

The patent applies local quality by creating a suspended region with specific photonic crystal structure that has enhanced opto-mechanical coupling properties. The suspended portion of the waveguide is designed with different characteristics (lower mechanical stiffness, higher optical confinement) compared to the supported regions, enabling enhanced coupling ratio in a localized area while maintaining overall miniaturization.

Inventive Principle:

Principle #3Local quality

3Measurement precision

If strict environmental conditions are imposed, then measurement precision can be maintained, but ease of operation deteriorates

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidoperational constraints

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The patent replaces mechanical alignment systems with integrated photonic circuitry that is inherently stable and insensitive to environmental perturbations. The photonic crystal cavity provides robust optical confinement without requiring precise mechanical positioning, thereby maintaining measurement precision while eliminating the need for cleanroom and cryogenic operating conditions.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves higher coupling rates and stability, enabling operation beyond strict environmental conditions, such as room temperature, and reduces quantum noise, thereby increasing the signal-to-noise ratio and relaxing experimental constraints.

Implementation Method 1

The invention thus enables opto-mechanical coupling between a mechanical displacement within the resonator and a physical property of an optical signal that has passed through it

Methodology Applied

Scientific EffectOpto-mechanical coupling:

Implementation Method 2

The invention thus enables opto-mechanical coupling between a mechanical displacement within the resonator and a physical property of an optical signal that has passed through it. This opto-mechanical coupling is based, in particular, on a variation in the effective refractive index of the waveguide within the suspended region as the latter deforms

Methodology Applied

Scientific EffectVariation in effective refractive index:

Implementation Method 3

two Bragg mirrors. The waveguide and the Bragg mirrors are arranged suspended above a substrate by means of support arms

Methodology Applied

Scientific EffectBragg reflection: Bragg Diffraction

Data Source

PatentEP3647738B1Opto-mechanical resonator with a wave sub-length waveguide

Publication Date: 2022.04.27 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Figure 1A~1C
Figure 2~4B
Figure 5~7

AI summary

An opto-mechanical resonator (100) comprising: - a waveguide (110) made up of a plurality of first bars spaced apart; and - two mirrors (120) arranged facing each other, optically reflective over at least a portion of a wavelength range of the waveguide; The waveguide (110) extends between the two mirrors (120) and forms with them an optically resonant cavity (160). At least a portion of the waveguide (110) is suspended above a substrate by at least one deformable mechanical element. The opto-mechanical resonator (100) according to the invention offers optical coupling ratios significantly higher than those of prior art devices.