Optoelectromechanical Switch with Gold Membrane

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Solution Overview

Problem

Current optical telecommunication networks face constraints in speed, capacity, and connectivity due to increasing network traffic, necessitating the development of efficient fiber optic switches that can provide low cost, low crosstalk, reliable, compact, reconfigurable, modular, scalable, high-speed, and wavelength/polarization-insensitive characteristics without electrical-to-optical or optical-to-electrical conversions.

Innovation Solution

The optoelectromechanical switch utilizes a hybrid-photonic-plasmonic configuration with a silicon waveguide and a thin gold membrane to achieve electrostatically induced light switching under CMOS voltages, minimizing optical losses and enabling rapid switching by nanometer-scale perturbation of the membrane position, thereby providing strong opto-electro-mechanical effects and efficient light-matter interaction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional electrical-to-optical or optical-to-electrical conversion methods are used in optical switches, then signal routing capability is improved, but device complexity and loss increase

Engineering Contradiction:
Improvesignal routing capabilityVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces electrical-to-optical conversion mechanisms with a purely optical switching mechanism using an optoelectromechanical resonator. The resonator uses electrostatic actuation to mechanically adjust its position relative to the waveguide, thereby controlling light coupling without requiring electrical signal conversion. This substitution eliminates complex electro-optic converters while maintaining routing capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention extracts and eliminates the electrical-to-optical conversion stage from the optical switching system. By using direct optical coupling control through mechanical resonator positioning, the system removes the intermediate electrical conversion layer, reducing device complexity and associated losses.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If conventional optical switches are used, then basic switching function is achieved, but optical losses are high (not meeting the 0.1 dB requirement)

Engineering Contradiction:
Improveswitching functionVSAvoidoptical losses
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent employs resonant coupling between the optoelectromechanical resonator and the optical waveguide to dramatically reduce optical losses. By tuning the resonator frequency to match the waveguide mode, the system achieves highly efficient energy transfer with minimal loss. The electrostatic actuation allows precise control of the resonator-waveguide coupling parameter, enabling lossless switching.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The resonator is designed to oscillate at specific resonant frequencies that couple efficiently with the optical waveguide modes. This mechanical vibration principle enables resonant enhancement of the light-matter interaction, achieving ultra-low loss coupling and switching performance.

Inventive Principle:
Principle #18Mechanical vibration

3Ease of manufacture

If larger device footprints are used in conventional switches, then manufacturing and alignment are easier, but integration density and scalability are reduced

Engineering Contradiction:
Improvemanufacturing easeVSAvoiddevice footprint
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The optoelectromechanical resonator is integrated within the optical waveguide structure itself, with the resonator cavity formed using the waveguide core and cladding layers. This nested configuration allows the switching function to be embedded within the existing photonic circuit footprint, achieving compact integration without sacrificing manufacturability.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent utilizes the vertical dimension by suspending the resonator above the waveguide plane with a controllable gap. This three-dimensional configuration allows the resonator to be positioned precisely in the vertical direction through electrostatic actuation, enabling compact lateral footprints while maintaining effective optical coupling through vertical field confinement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Device complexity

If slower switching speeds are used in conventional switches, then device simplicity is maintained, but network capacity and speed requirements are not met

Engineering Contradiction:
Improvedevice simplicityVSAvoidswitching speed
Core Design Contradiction:
Device complexityVSSpeed

Solution Approach 1:

The patent replaces slow thermal or mechanical switching mechanisms with electrostatic actuation of the resonator. The electrostatic force can be applied and removed almost instantaneously, enabling the resonator to quickly adjust its position and coupling state, thereby achieving high-speed switching while maintaining relatively simple device structure.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in record performance with low optical losses (0.1 dB), fast switching times (tens of nanoseconds), and compact footprints, overcoming deficiencies in conventional switches by leveraging strong light-matter interaction and resonant enhancement, suitable for applications in optical neural networks, quantum information processing, and large-scale optical networks.

Implementation Method 1

the electrically conductive membrane: receives a membrane electrical potential to be electrically biased at the substrate electrical counter potential, and deflects toward and away from the electrically conductive high-index optical waveguide based on a difference in potential between the membrane electrical potential and the substrate electrical counter potential

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

receives resonator light that is subject to optical communication to a resonator when a cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 3

The optoelectromechanical switch utilizes a hybrid-photonic-plasmonic configuration with a silicon waveguide and a thin gold membrane to achieve electrostatically induced light switching under CMOS voltages, minimizing optical losses and enabling rapid switching by nanometer-scale perturbation of the membrane position, thereby providing strong opto-electro-mechanical effects and efficient light-matter interaction

Methodology Applied
Scientific EffectOpto-electro-mechanical effect: MOEMS

Data Source

PatentUS11874504B2Optoelectromechanical switch and programming an optical network
Publication Date: 2024.01.16 THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY DEPARTMENT OF HEALTH & HUMAN SERVICES
  • US11874504B2 patent drawing
  • US11874504B2 patent drawing
  • US11874504B2 patent drawing

AI summary

Disclosed is an optoelectromechanical switch that includes: an optical feedline disposed on an isolation substrate that receives resonator light that is subject to optical communication to a resonator when a cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light; a resonator including: a low refractive index optical layer and receives substrate electrical counter potential; a non-conductive spacer; the electrically conductive membrane and that receives a membrane electrical potential and deflects toward and away from the electrically conductive high-index optical waveguide based on a difference in potential between the membrane electrical potential and the substrate electrical counter potential; the cavity length that is variable and under electromechanical control.