Optoelectronic Component Recess Geometry for Dislocation Control

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Solution Overview

Problem

Existing optoelectronic components face challenges in preventing dislocations at fracture edges, particularly on mirror surfaces, due to shallow recesses being ineffective and deep recesses acting as disturbance centers, requiring precise control of recess depth and geometry to achieve effective passivation and dislocation suppression.

Innovation Solution

The component features a recess with at least one inclined side surface, allowing for reliable overmolding with a dielectric for passivation, and a defined depth in the active zone region to prevent dislocations, with side surfaces angled between 95° to 160° and a depth of 100 nm to 800 nm, reducing stress and facilitating efficient shielding of the active zone.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a recess is made shallow to avoid acting as a disturbance center, then manufacturing is easier, but it becomes ineffective in reducing dislocations at the fracture edge

Engineering Contradiction:
Improvedislocation suppressionVSAvoidrecess depth control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent changes the geometric parameters of the recess, specifically setting the depth between 100-800 nm and side surface angles between 95°-160°, to optimize both dislocation suppression effectiveness and manufacturing feasibility. This parameter optimization resolves the contradiction by finding a depth range that is deep enough to prevent dislocations but not so deep as to create disturbance centers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by creating an inclined side surface structure specifically at the recess region where dislocations form, while maintaining the overall mirror surface quality. The inclined surfaces (95°-160° angles) are localized to the recess area to deflect dislocations, while the rest of the mirror surface remains flat for optimal optical performance.

Inventive Principle:
Principle #3Local quality

2Reliability

If a recess is made deep to effectively prevent dislocations, then dislocation suppression improves, but it acts as a disturbance center and reduces component reliability

Engineering Contradiction:
Improvedislocation suppressionVSAvoiddisturbance center formation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent optimizes the recess depth parameter to be between 100-800 nm, which is sufficient to intercept dislocations at the fracture edge but not deep enough to create stress concentration or act as a disturbance center. This precise parameter control resolves the contradiction between effective dislocation prevention and avoiding harmful disturbances.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs rounded transitions at the recess corners and inclined side surfaces instead of sharp edges. The curved and inclined surfaces distribute stress more evenly and prevent the formation of disturbance centers, while still maintaining effective dislocation suppression.

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Ease of manufacture

If vertical side walls are used in the recess, then manufacturing is simpler, but dielectric coating for passivation is unreliable

Engineering Contradiction:
Improverecess fabricationVSAvoiddielectric coating quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces vertical side walls with inclined side surfaces (95°-160° angles) and rounded transitions. These curved and inclined surfaces eliminate sharp corners where dielectric coating would be unreliable, providing smooth surfaces that ensure complete and uniform coating coverage while remaining manufacturable through standard etching processes.

Inventive Principle:
Principle #14Spheroidality (Curvature)

4Ease of manufacture

If the recess depth is not precisely controlled, then manufacturing is easier, but dislocation prevention at the fracture edge is ineffective

Engineering Contradiction:
Improverecess depth control toleranceVSAvoiddislocation prevention
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent defines a specific depth range (100-800 nm) that provides effective dislocation prevention while accommodating reasonable manufacturing tolerances. This parameter range is optimized to ensure that even with variations in manufacturing, the recess remains deep enough to intercept dislocations but not so deep as to create disturbance centers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The inclined side surfaces and rounded transitions provide a more robust structure that is less sensitive to precise depth control. The gradual slopes and curves ensure effective dislocation deflection even when the exact depth varies within the specified range, improving manufacturing tolerance compared to sharp-edged vertical recesses.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Data Source

PatentEP3660988B1Optoelectronic component and method for producing an optoelectronic component
Publication Date: 2021.10.20 OSRAM OPTO SEMICON GMBH & CO OHG
  • EP3660988B1 patent drawingFigure 1~2
  • EP3660988B1 patent drawingFigure 3~4
  • EP3660988B1 patent drawingFigure 5~6

AI summary

The invention relates to an optoelectronic component with a layered structure having an active zone for generating electromagnetic radiation, wherein the active zone is arranged in a first plane, wherein a recess is provided in the surface of the layered structure, wherein the recess adjoins an end face of the component, wherein the end face is arranged in a second plane, wherein the second plane is arranged substantially perpendicular to the first plane, wherein the recess has a bottom surface and a side surface, wherein the side surface is arranged substantially perpendicular to the end surface, wherein the side surface is arranged at an angle other than 90° to the first plane of the active zone, and wherein the bottom surface is arranged in the region of the first plane of the active zone.